Inventor · disambiguated record
Yao-Chi Chang
Also filed as: CHANG YAO-CHI
4 granted patents·53 citations·filing 1999–2004
77Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0166US6919259B2Method for STI etching using endpoint detectionTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jul 19, 2005·14 cites·20 claims
- 0262US6455433B1Method for forming square-shouldered sidewall spacers and devices fabricatedTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Sep 24, 2002·14 cites·15 claims
- 0354US7094653B2Method for forming STI structures with controlled step heightTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Aug 22, 2006·5 cites·22 claims
- 0452US6080627AMethod for forming a trench power metal-oxide semiconductor transistorMOSEL VITELIC INC·Filed 1999·Granted Jun 27, 2000·20 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →