Inventor · disambiguated record
Martinus Godefridus Helena Boogaarts
Also filed as: BOOGAARTS MARTINUS GODEFRIDUS
2 granted patents·15 citations·filing 2003–2004
56Inventor score
Technology areasG03F
Files withASML NETHERLANDS BV2
Top patents by PatentIndex Score
2 records- 0171US7193722B2Lithographic apparatus with disturbance correction system and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Mar 20, 2007·12 cites·28 claims
- 0250US7227614B2Measurement method, device manufacturing method and lithographic apparatusASML NETHERLANDS BV·Filed 2004·Granted Jun 5, 2007·3 cites·27 claims
Join the waitlist — get patent alerts
Get an alert when Martinus Godefridus Helena Boogaarts files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →