Inventor · disambiguated record
Robert M. Merkling, Jr.
Also filed as: MERKLING JR ROBERT M
4 granted patents·166 citations·filing 1984–2004
80Inventor score
Files withIBM4
Top patents by PatentIndex Score
4 records- 0191US4528066ASelective anisotropic reactive ion etching process for polysilicide composite structuresIBM·Filed 1984·Granted Jul 9, 1985·93 cites·14 claims
- 0286US7056192B2Ceria-based polish processes, and ceria-based slurriesIBM·Filed 2004·Granted Jun 6, 2006·45 cites·6 claims
- 0369US6227948B1Polishing pad reconditioning via polishing pad material as conditionerIBM·Filed 2000·Granted May 8, 2001·13 cites·13 claims
- 0451US6102776AApparatus and method for controlling polishing of integrated circuit substratesIBM·Filed 1999·Granted Aug 15, 2000·15 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →