Inventor · disambiguated record
Takao Funakubo
Also filed as: FUNAKUBO TAKAO
8 granted patents·4 pending applications·1 citations·filing 2014–2024
72Inventor score
Files withTOKYO ELECTRON LTD12
Top patents by PatentIndex Score
12 records- 0171US10903085B2Method for etching organic regionTOKYO ELECTRON LTD·Filed 2019·Granted Jan 26, 2021·1 cites·19 claims
- 0261US10923332B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Feb 16, 2021·0 cites·12 claims
- 0360US10626497B2Method for cleaning components of plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Apr 21, 2020·0 cites·12 claims
- 0460US2025124357A1Information processing method, computer program, and information processing apparatusTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0557US10861675B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Dec 8, 2020·0 cites·3 claims
- 0653US9653317B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted May 16, 2017·0 cites·5 claims
- 0749US10204763B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2015·Granted Feb 12, 2019·0 cites·5 claims
- 0848US2017221684A1Plasma processing methodTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
- 0947US10734204B2Method for cleaning components of plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Aug 4, 2020·0 cites·13 claims
- 1036US2021130955A1Film forming apparatus and film forming methodTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 1134US2021140044A1Film forming method and film forming apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
- 1230US9779962B2Plasma etching methodTOKYO ELECTRON LTD·Filed 2015·Granted Oct 3, 2017·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →