Inventor · disambiguated record
Stefanie Hilt
Also filed as: HILT STEFANIE
5 granted patents·6 citations·filing 2014–2018
69Inventor score
Technology areasG03F
Files withZEISS CARL SMT GMBH5
Top patents by PatentIndex Score
5 records- 0183US9500954B2Illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2014·Granted Nov 22, 2016·3 cites·21 claims
- 0282US10444631B2Method of operating a microlithographic projection apparatus and illumination system of such an apparatusZEISS CARL SMT GMBH·Filed 2018·Granted Oct 15, 2019·2 cites·22 claims
- 0371US9310690B2Illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2014·Granted Apr 12, 2016·1 cites·21 claims
- 0456US9910359B2Illumination system of a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2016·Granted Mar 6, 2018·0 cites·27 claims
- 0548US9753375B2Illumination optical unit for projection lithographyZEISS CARL SMT GMBH·Filed 2014·Granted Sep 5, 2017·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →