Inventor · disambiguated record
Yuebin Zhu
Also filed as: ZHU YUEBIN
8 granted patents·1 citations·filing 2014–2018
71Inventor score
Top patents by PatentIndex Score
8 records- 0165US10748800B2Chip bonding apparatus and methodSHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO LTD·Filed 2017·Granted Aug 18, 2020·1 cites·17 claims
- 0242US10691025B2Reaction force diversion mechanism, motor device and photolithography machineSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Jun 23, 2020·0 cites·12 claims
- 0340US11037900B2Chip bonding device and bonding method thereofSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Jun 15, 2021·0 cites·19 claims
- 0438US10770320B2Universal chip batch-bonding apparatus and methodSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2017·Granted Sep 8, 2020·0 cites·12 claims
- 0537US11081380B2Chip bonding deviceSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2018·Granted Aug 3, 2021·0 cites·18 claims
- 0635US10041548B2Silicon wafer edge protection device with collision protection functionSHANGHAI MICROELECTRONICS EQUI·Filed 2014·Granted Aug 7, 2018·0 cites·12 claims
- 0731US9760022B2Lithography machine workpiece table and vertical position initialization method thereofSHANGHAI MICROELECTRONICS EQUI·Filed 2015·Granted Sep 12, 2017·0 cites·13 claims
- 0830US10353297B2Moving platform device, exposure device and lithography machineSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2016·Granted Jul 16, 2019·0 cites·18 claims
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