Inventor · disambiguated record
Guido Limbach
Also filed as: LIMBACH GUIDO
18 granted patents·3 pending applications·23 citations·filing 2005–2025
90Inventor score
Top patents by PatentIndex Score
21 records- 0191US9316929B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2013·Granted Apr 19, 2016·10 cites·22 claims
- 0290US10031423B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2017·Granted Jul 24, 2018·4 cites·20 claims
- 0378US9175948B2Optical module with a measuring deviceZEISS CARL SMT GMBH·Filed 2013·Granted Nov 3, 2015·4 cites·21 claims
- 0472US9575224B2Mirror, projection objective with such mirror, and projection exposure apparatus for microlithography with such projection objectiveZEISS CARL SMT GMBH·Filed 2013·Granted Feb 21, 2017·3 cites·22 claims
- 0572US2025370356A1Optical system and projection exposure systemZEISS CARL SMT GMBH·Filed 2025·Application pending·0 cites
- 0668US10684551B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2019·Granted Jun 16, 2020·0 cites·9 claims
- 0765US8659745B2Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrationsZEISS CARL SMT GMBH·Filed 2013·Granted Feb 25, 2014·1 cites·32 claims
- 0863US10317802B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2018·Granted Jun 11, 2019·0 cites·21 claims
- 0959US2018031827A1Lens module comprising at least one exchangeable optical elementZEISS CARL SMT GMBH·Filed 2017·Application pending·0 cites
- 1058US10203607B2Optical element unit for exposure processesZEISS CARL SMT GMBH·Filed 2014·Granted Feb 12, 2019·0 cites·29 claims
- 1158US9746778B2EUV exposure apparatus with reflective elements having reduced influence of temperature variationZEISS CARL SMT GMBH·Filed 2016·Granted Aug 29, 2017·0 cites·14 claims
- 1258US8939587B2Lens module comprising at least one exchangeable optical elementZEISS CARL SMT GMBH·Filed 2013·Granted Jan 27, 2015·0 cites·36 claims
- 1357US8376559B2Lens module comprising at least one exchangeable optical elementZEISS CARL SMT GMBH·Filed 2012·Granted Feb 19, 2013·0 cites·8 claims
- 1456US9703098B2Lens module comprising at least one exchangeable optical elementZEISS CARL SMT GMBH·Filed 2016·Granted Jul 11, 2017·0 cites·4 claims
- 1556US9046795B2Optical element unit for exposure processes having sealing elementSCHWERTNER TILMAN·Filed 2008·Granted Jun 2, 2015·1 cites·52 claims
- 1655US9551944B2Method for replacing objective partsZEISS CARL SMT GMBH·Filed 2014·Granted Jan 24, 2017·0 cites·20 claims
- 1753US9423695B2Lens module comprising at least one exchangeable optical elementZEISS CARL SMT GMBH·Filed 2015·Granted Aug 23, 2016·0 cites·26 claims
- 1850US7545483B2Optical element unit for exposure processesZEISS CARL SMT AG·Filed 2008·Granted Jun 9, 2009·0 cites·82 claims
- 1948US2009260654A1Method and device for replacing objective partsZEISS CARL SMT AG·Filed 2009·Application pending·0 cites
- 2045US8542346B2Optical system with an exchangeable, manipulable correction arrangement for reducing image aberrationsLIMBACH GUIDO·Filed 2009·Granted Sep 24, 2013·0 cites·33 claims
- 2144US8092029B2Lens module comprising at least one exchangeable optical elementSOYEZ GUIDO·Filed 2005·Granted Jan 10, 2012·0 cites·37 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →