Inventor · disambiguated record
Etsuko Kubo
Also filed as: KUBO ETSUKO
6 granted patents·5 pending applications·6 citations·filing 2011–2016
72Inventor score
Top patents by PatentIndex Score
11 records- 0173US9773688B2Ultrasonic cleaning method and ultrasonic cleaning apparatusSILTRONIC AG·Filed 2013·Granted Sep 26, 2017·3 cites·19 claims
- 0270US9457385B2Ultrasonic cleaning method and ultrasonic cleaning apparatusSILTRONIC AG·Filed 2013·Granted Oct 4, 2016·1 cites·16 claims
- 0366US8575571B2Cleaning apparatus, measurement method and calibration methodHAIBARA TERUO·Filed 2012·Granted Nov 5, 2013·2 cites·7 claims
- 0453US10137483B2Ultrasonic cleaning methodSILTRONIC AG·Filed 2016·Granted Nov 27, 2018·0 cites·5 claims
- 0552US9662687B2Ultrasonic cleaning methodSILTRONIC AG·Filed 2015·Granted May 30, 2017·0 cites·14 claims
- 0645US2013192628A1Cleaning apparatus, equipment, and methodMORI YOSHIHIRO·Filed 2012·Application pending·0 cites
- 0739US8778085B2Dissolved nitrogen concentration monitoring method, substrate cleaning method, and substrate cleaning apparatusHAIBARA TERUO·Filed 2011·Granted Jul 15, 2014·0 cites·9 claims
- 0839US2013312789A1Ultrasonic cleaning method and ultrasonic cleaning apparatusSILTRONIC AG·Filed 2013·Application pending·0 cites
- 0939US2013312788A1Ultrasonic cleaning method and ultrasonic cleaning apparatusSILTRONIC AG·Filed 2013·Application pending·0 cites
- 1037US2013192627A1Cleaning methodKUBO ETSUKO·Filed 2012·Application pending·0 cites
- 1136US2013160791A1Ultrasonic cleaning methodHAIBARA TERUO·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →