Inventor · disambiguated record
Seiro Murakami
Also filed as: MURAKAMI SEIRO
15 granted patents·1 pending application·1,774 citations·filing 1984–2003
96Inventor score
Top patents by PatentIndex Score
16 records- 0199US6608681B2Exposure method and apparatusNIKON CORP·Filed 2002·Granted Aug 19, 2003·171 cites·19 claims
- 0299US5448332AExposure method and apparatusNIKON CORP·Filed 1994·Granted Sep 5, 1995·705 cites·38 claims
- 0396US5693439AExposure method and apparatusNIKON CORP·Filed 1995·Granted Dec 2, 1997·117 cites·25 claims
- 0495US6433872B1Exposure method and apparatusNIKON CORP·Filed 1999·Granted Aug 13, 2002·99 cites·42 claims
- 0595US5883704AProjection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical systemNIKON CORP·Filed 1996·Granted Mar 16, 1999·183 cites·46 claims
- 0695US4677301AAlignment apparatusNIPPON KOGAKU KK·Filed 1984·Granted Jun 30, 1987·90 cites·18 claims
- 0793US5739899AProjection exposure apparatus correcting tilt of telecentricityNIKON CORP·Filed 1996·Granted Apr 14, 1998·92 cites·29 claims
- 0888US5464715AMethod of driving mask stage and method of mask alignmentNIKON CORP·Filed 1994·Granted Nov 7, 1995·59 cites·9 claims
- 0987US4860374AApparatus for detecting position of reference patternNIKON CORP·Filed 1988·Granted Aug 22, 1989·109 cites·7 claims
- 1085US4655598APosition detection method and apparatusNIPPON KOGAKU KK·Filed 1985·Granted Apr 7, 1987·41 cites·12 claims
- 1180USRE38320EProjection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical systemNIPPON KOGAKU KK·Filed 2001·Granted Nov 18, 2003·20 cites·59 claims
- 1279US4702606APosition detecting systemNIPPON KOGAKU KK·Filed 1985·Granted Oct 27, 1987·30 cites·16 claims
- 1376US6894763B2Exposure apparatus and methods utilizing plural mask and object stages movable in opposite directions, and methods of producing devices using the sameNIKON CORP·Filed 2003·Granted May 17, 2005·15 cites·103 claims
- 1468US4639604AMethod and apparatus for detecting an edge position of a pattern and eliminating overlapping pattern signalsNIPPON KAGAKU KK·Filed 1986·Granted Jan 27, 1987·30 cites·17 claims
- 1552USRE38113EMethod of driving mask stage and method of mask alignmentNIPPON KOGAKU KK·Filed 1999·Granted May 6, 2003·13 cites·105 claims
- 1641US2003164933A1Projection exposure apparatusNIKON CORP·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →