Inventor · disambiguated record
Shigeyoshi Netsu
Also filed as: NETSU SHIGEYOSHI
44 granted patents·18 pending applications·387 citations·filing 1991–2021
97Inventor score
Files withSHINETSU CHEMICAL CO40SHINETSU HANDOTAI KK8NETSU SHIGEYOSHI7PRE TECH CO LTD3KUROSAWA YASUSHI2
Top patents by PatentIndex Score
62 records- 0191US10377636B2Method for producing polycrystalline silicon rod, polycrystalline silicon rod, and polycrystalline silicon massSHINETSU CHEMICAL CO·Filed 2015·Granted Aug 13, 2019·3 cites·1 claims
- 0287US7582221B2Wafer manufacturing method, polishing apparatus, and waferSHINETSU HANDOTAI KK·Filed 2001·Granted Sep 1, 2009·33 cites·9 claims
- 0385US11167994B2Polycrystalline silicon rod, processing method for polycrystalline silicon rod, method for evaluating polycrystalline silicon rod, and method for producing FZ single crystal siliconSHINETSU CHEMICAL CO·Filed 2020·Granted Nov 9, 2021·1 cites·8 claims
- 0482US5733434AApparatus and method for cleaning semiconductor wafersPRE TECH CO LTD·Filed 1996·Granted Mar 31, 1998·83 cites·14 claims
- 0580US9274069B2Method for evaluating degree of crystalline orientation of polycrystalline silicon, method for selecting polycrystalline silicon rod, polycrystalline silicon rod, polycrystalline silicon ingot, and method for manufacturing monocrystalline siliconSHINETSU CHEMICAL CO·Filed 2013·Granted Mar 1, 2016·3 cites·20 claims
- 0680US9193596B2Reactor for producing polycrystalline silicon, system for producing polycrystalline silicon, and process for producing polycrystalline siliconNETSU SHIGEYOSHI·Filed 2010·Granted Nov 24, 2015·2 cites·20 claims
- 0779US12162762B2Polycrystalline silicon rodSHINETSU CHEMICAL CO·Filed 2021·Granted Dec 10, 2024·0 cites·11 claims
- 0879US6003527ACleaning apparatus and a cleaning methodPRE TECH CO LTD·Filed 1997·Granted Dec 21, 1999·61 cites·23 claims
- 0977US5725753AApparatus and method for cleaning semiconductor wafersPRE TECH CO LTD·Filed 1996·Granted Mar 10, 1998·55 cites·19 claims
- 1073US11440804B2Process for producing polycrystalline silicon massSHINETSU CHEMICAL CO·Filed 2018·Granted Sep 13, 2022·0 cites·11 claims
- 1173US10865498B2Polycrystalline silicon rod, method for producing polycrystalline silicon rod, and single-crystalline siliconSHINETSU CHEMICAL CO·Filed 2018·Granted Dec 15, 2020·0 cites·1 claims
- 1272US12060277B2Method for producing polycrystalline siliconSHINETSU CHEMICAL CO·Filed 2020·Granted Aug 13, 2024·0 cites·4 claims
- 1372US10611635B2Hydrogen gas recovery system and hydrogen gas separation and recovery methodSHINETSU CHEMICAL CO·Filed 2016·Granted Apr 7, 2020·1 cites·9 claims
- 1472US5186192AApparatus for cleaning silicon waferSHINETSU HANDOTAI KK·Filed 1991·Granted Feb 16, 1993·58 cites·7 claims
- 1569US10870581B2Reaction furnace for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, method for producing polycrystalline silicon, and polycrystalline silicon rod or polycrystalline silicon ingotSHINETSU CHEMICAL CO·Filed 2020·Granted Dec 22, 2020·0 cites·3 claims
- 1669US9017482B2System for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, and process for producing polycrystalline siliconNETSU SHIGEYOSHI·Filed 2010·Granted Apr 28, 2015·2 cites·12 claims
- 1769US6787797B2Semiconductor wafer and device for semiconductor device manufacturing processSHINETSU HANDOTAI KK·Filed 2001·Granted Sep 7, 2004·12 cites·19 claims
- 1866US9006002B2Polycrystalline silicon rod and method for manufacturing polycrystalline silicon rodNETSU SHIGEYOSHI·Filed 2011·Granted Apr 14, 2015·2 cites·20 claims
- 1966US2019367374A1Polycrystalline silicon rodSHINETSU CHEMICAL CO·Filed 2019·Application pending·0 cites
- 2065US5409770AElastic foamed sheet and wafer-polishing jig using the sheetSHINETSU HANDOTAI KK·Filed 1993·Granted Apr 25, 1995·23 cites·12 claims
- 2164US11242620B2Polycrystalline silicon rod and method for producing polycrystalline silicon rodSHINETSU CHEMICAL CO·Filed 2018·Granted Feb 8, 2022·0 cites·2 claims
- 2264US10066320B2Polycrystalline silicon, FZ single crystal silicon, and method for producing the sameSHINETSU CHEMICAL CO·Filed 2017·Granted Sep 4, 2018·0 cites·7 claims
- 2363US10858259B2Reactor for polycrystalline silicon production and method for producing polycrystalline siliconSHINETSU CHEMICAL CO·Filed 2016·Granted Dec 8, 2020·0 cites·3 claims
- 2462US10800659B2Polycrystalline silicon rod, processing method for polycrystalline silicon rod, method for evaluating polycrystalline silicon rod, and method for producing FZ single crystal siliconSHINETSU CHEMICAL CO·Filed 2015·Granted Oct 13, 2020·0 cites·6 claims
- 2562US9437429B2Polycrystalline silicon manufacturing apparatus and polycrystalline silicon manufacturing methodSHINETSU CHEMICAL CO·Filed 2012·Granted Sep 6, 2016·1 cites·5 claims
- 2660US8328935B2Method of manufacturing polycrystalline silicon rodMIZUNO MICHIHIRO·Filed 2009·Granted Dec 11, 2012·1 cites·10 claims
- 2760US5538465AElastic foamed sheet and wafer-polishing jig using the sheetSHINETSU HANDOTAI KK·Filed 1995·Granted Jul 23, 1996·21 cites·17 claims
- 2858US9328429B2Method for evaluating degree of crystal orientation in polycrystalline silicon, selection method for polycrystalline silicon rods, and production method for single crystal siliconSHINETSU CHEMICAL CO·Filed 2013·Granted May 3, 2016·0 cites·19 claims
- 2957US10858258B2Reaction furnace for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, method for producing polycrystalline silicon, and polycrystalline silicon rod or polycrystalline silicon ingotSHINETSU CHEMICAL CO·Filed 2015·Granted Dec 8, 2020·0 cites·6 claims
- 3057US8793853B2Core wire holder for producing polycrystalline silicon and method for producing polycrystalline siliconNETSU SHIGEYOSHI·Filed 2010·Granted Aug 5, 2014·1 cites·17 claims
- 3157US2016319430A1Apparatus for producing polycrystalline silicon and method for producing polycrystalline siliconSHINETSU CHEMICAL CO·Filed 2016·Application pending·0 cites
- 3256US10343922B2Polycrystalline silicon rod, production method therefor, and FZ silicon single crystalSHINETSU CHEMICAL CO·Filed 2015·Granted Jul 9, 2019·0 cites·14 claims
- 3356US2017058427A1Polycrystalline silicon rod, method for producing polycrystalline silicon rod, and single-crystalline siliconSHINETSU CHEMICAL CO·Filed 2015·Application pending·0 cites
- 3456US2012175613A1Polycrystalline silicon mass and process for producing polycrystalline silicon massNETSU SHIGEYOSHI·Filed 2010·Application pending·0 cites
- 3555US9562289B2Carbon electrode with slidable contact surfaces and apparatus for manufacturing polycrystalline silicon rodNETSU SHIGEYOSHI·Filed 2010·Granted Feb 7, 2017·0 cites·6 claims
- 3655US2016187268A1Method for evaluating crystal grain size distribution of polycrystalline siliconSHINETSU CHEMICAL CO·Filed 2014·Application pending·0 cites
- 3755US2016116423A1Method for evaluating crystallinity of polycrystalline siliconSHINETSU CHEMICAL CO·Filed 2014·Application pending·0 cites
- 3855US2009057840A1Wafer manufacturing method, polishing apparatus, and waferSHINETSU HANDOTAI KK·Filed 2008·Application pending·0 cites
- 3954US10914021B2Polycrystalline silicon rod and method for producing single crystal siliconSHINETSU CHEMICAL CO·Filed 2018·Granted Feb 9, 2021·0 cites·2 claims
- 4054US9416444B2Apparatus for producing polycrystalline silicon and method for producing polycrystalline siliconKUROSAWA YASUSHI·Filed 2011·Granted Aug 16, 2016·0 cites·5 claims
- 4153US10760180B2Polycrystalline silicon ingot, polycrystalline silicon bar, and method for producing single crystal siliconSHINETSU CHEMICAL CO·Filed 2017·Granted Sep 1, 2020·0 cites·6 claims
- 4253US2015037516A1Polycrystalline silicon rod manufacturing methodSHINETSU CHEMICAL CO·Filed 2013·Application pending·0 cites
- 4353US2015017349A1Polycrystalline silicon rod manufacturing methodSHINETSU CHEMICAL CO·Filed 2013·Application pending·0 cites
- 4453US2015247239A1Carbon electrode and apparatus for manufacturing polycrystalline silicon rodSHINETSU CHEMICAL CO·Filed 2015·Application pending·0 cites
- 4552US9126242B2Method for cleaning bell jar, method for producing polycrystalline silicon, and apparatus for drying bell jarKUROSAWA YASUSHI·Filed 2011·Granted Sep 8, 2015·0 cites·12 claims
- 4652US7203559B2Method for manufacturing semiconductor wafer, method for receiving order for manufacture of semiconductor wafer, and system for receiving order for manufacture of semiconductor waferSHINETSU HANDOTAI KK·Filed 2003·Granted Apr 10, 2007·4 cites·35 claims
- 4752US2015345862A1Method for cleaning bell jar, method for producing polycrystalline silicon, and apparatus for drying bell jarSHINETSU CHEMICAL CO·Filed 2015·Application pending·0 cites
- 4850US10207932B2Trichlorosilane purification system and method for producing polycrystalline siliconSHINETSU CHEMICAL CO·Filed 2017·Granted Feb 19, 2019·0 cites·8 claims
- 4949US6099748ASilicon wafer etching method and silicon wafer etchantSHINETSU HANDOTAI KK·Filed 1998·Granted Aug 8, 2000·20 cites·10 claims
- 5047US10366882B2System for producing polycrystalline silicon, apparatus for producing polycrystalline silicon, and process for producing polycrystalline siliconSHINETSU CHEMICAL CO·Filed 2015·Granted Jul 30, 2019·0 cites·7 claims
Showing the top 50 of 62 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Shigeyoshi Netsu files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →