Inventor · disambiguated record
Dimitry Sanko
Also filed as: Sanko Dimitry
7 granted patents·1 pending application·7 citations·filing 2020–2025
75Inventor score
Files withKLA CORP8
Top patents by PatentIndex Score
8 records- 0193US11604420B2Self-calibrating overlay metrologyKLA CORP·Filed 2021·Granted Mar 14, 2023·2 cites·44 claims
- 0290US12181271B2Estimating in-die overlay with tool induced shift correctionKLA CORP·Filed 2022·Granted Dec 31, 2024·2 cites·22 claims
- 0386US11556738B2System and method for determining target feature focus in image-based overlay metrologyKLA CORP·Filed 2020·Granted Jan 17, 2023·2 cites·21 claims
- 0481US11604063B2Self-calibrated overlay metrology using a skew training sampleKLA CORP·Filed 2021·Granted Mar 14, 2023·1 cites·26 claims
- 0576US11880142B2Self-calibrating overlay metrologyKLA CORP·Filed 2023·Granted Jan 23, 2024·0 cites·34 claims
- 0674US12480893B2Optical and X-ray metrology methods for patterned semiconductor structures with randomnessKLA CORP·Filed 2024·Granted Nov 25, 2025·0 cites·39 claims
- 0770US11921825B2System and method for determining target feature focus in image-based overlay metrologyKLA CORP·Filed 2023·Granted Mar 5, 2024·0 cites·21 claims
- 0868US2025237619A1Optical and x-ray metrology methods for patterned semiconductor structures with randomnessKLA CORP·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →