Inventor · disambiguated record
Johannes Martinus Andreas Hazenberg
Also filed as: HAZENBERG JOHANNES MARTINUS AN · HAZENBERG JOHANNES MARTINUS ANDREAS
4 granted patents·41 citations·filing 2004–2009
74Inventor score
Technology areasG03F
Top patents by PatentIndex Score
4 records- 0190US7724351B2Lithographic apparatus, device manufacturing method and exchangeable optical elementASML NETHERLANDS BV·Filed 2006·Granted May 25, 2010·12 cites·34 claims
- 0285US7307695B2Method and device for alignment of a substrateASML NETHERLANDS BV·Filed 2004·Granted Dec 11, 2007·27 cites·23 claims
- 0368US7576835B2Substrate handler, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Aug 18, 2009·2 cites·19 claims
- 0450US8174680B2Substrate handler, lithographic apparatus and device manufacturing methodVAN DER SCHOOT HARMEN KLAAS·Filed 2009·Granted May 8, 2012·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →