Inventor · disambiguated record
Daniel E. Sutton
Also filed as: SUTTON DANIEL E
4 granted patents·1 pending application·22 citations·filing 2000–2013
72Inventor score
Top patents by PatentIndex Score
5 records- 0163US6440621B1Method of detecting film defects using chemical exposure of photoresist filmsADVANCED MICRO DEVICES INC·Filed 2000·Granted Aug 27, 2002·11 cites·25 claims
- 0258US6649525B1Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing processADVANCED MICRO DEVICES INC·Filed 2002·Granted Nov 18, 2003·7 cites·15 claims
- 0346US6524869B1Method and apparatus for detecting ion implant induced defectsADVANCED MICRO DEVICES INC·Filed 2001·Granted Feb 25, 2003·2 cites·37 claims
- 0441US6759179B1Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing processADVANCED MICRO DEVICES INC·Filed 2002·Granted Jul 6, 2004·2 cites·14 claims
- 0537US2015155162A1Reduction of Charging Induced Damage in Photolithography Wet ProcessSPANSION LLC·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →