Inventor · disambiguated record
Dan B. Millward
Also filed as: MILLWARD DAN · MILLWARD DAN B
103 granted patents·14 pending applications·1,632 citations·filing 2000–2020
99Inventor score
Top patents by PatentIndex Score
117 records- 0199US8083953B2Registered structure formation via the application of directed thermal energy to diblock copolymer filmsMILLWARD DAN B·Filed 2007·Granted Dec 27, 2011·99 cites·37 claims
- 0299US6517933B1Hybrid polymer materialsNANO TEX LLC·Filed 2000·Granted Feb 11, 2003·185 cites·25 claims
- 0398US8900963B2Methods of forming semiconductor device structures, and related structuresSILLS SCOTT E·Filed 2011·Granted Dec 2, 2014·26 cites·30 claims
- 0498US8513359B2Crosslinkable graft polymer non preferentially wetted by polystyrene and polyethylene oxideMILLWARD DAN B·Filed 2012·Granted Aug 20, 2013·22 cites·14 claims
- 0598US8080615B2Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxideMILLWARD DAN B·Filed 2007·Granted Dec 20, 2011·34 cites·34 claims
- 0698US7964107B2Methods using block copolymer self-assembly for sub-lithographic patterningMICRON TECHNOLOGY INC·Filed 2007·Granted Jun 21, 2011·68 cites·76 claims
- 0798US7959975B2Methods of patterning a substrateMICRON TECHNOLOGY INC·Filed 2007·Granted Jun 14, 2011·59 cites·39 claims
- 0897US8785559B2Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxideMICRON TECHNOLOGY INC·Filed 2013·Granted Jul 22, 2014·17 cites·20 claims
- 0997US8753738B2Registered structure formation via the application of directed thermal energy to diblock copolymer filmsMICRON TECHNOLOGY INC·Filed 2013·Granted Jun 17, 2014·14 cites·25 claims
- 1097US8426313B2Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preferenceMILLWARD DAN B·Filed 2008·Granted Apr 23, 2013·28 cites·32 claims
- 1197US8304493B2Methods of forming block copolymersMILLWARD DAN B·Filed 2010·Granted Nov 6, 2012·19 cites·11 claims
- 1297US8294139B2Multilayer antireflection coatings, structures and devices including the same and methods of making the sameMARSH EUGENE P·Filed 2007·Granted Oct 23, 2012·47 cites·15 claims
- 1397US8114301B2Graphoepitaxial self-assembly of arrays of downward facing half-cylindersMILLWARD DAN B·Filed 2008·Granted Feb 14, 2012·38 cites·34 claims
- 1497US8114300B2Multi-layer method for formation of registered arrays of cylindrical pores in polymer filmsMILLWARD DAN B·Filed 2008·Granted Feb 14, 2012·48 cites·35 claims
- 1597US8097175B2Method for selectively permeating a self-assembled block copolymer, method for forming metal oxide structures, method for forming a metal oxide pattern, and method for patterning a semiconductor structureMILLWARD DAN B·Filed 2008·Granted Jan 17, 2012·43 cites·24 claims
- 1697US6679924B2Dye fixativesNANO TEX LLC·Filed 2003·Granted Jan 20, 2004·37 cites·2 claims
- 1796US8633112B2Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preferenceMILLWARD DAN B·Filed 2012·Granted Jan 21, 2014·15 cites·25 claims
- 1896US8551808B2Methods of patterning a substrate including multilayer antireflection coatingsMARSH EUGENE P·Filed 2012·Granted Oct 8, 2013·23 cites·20 claims
- 1996US8512846B2Two-dimensional arrays of holes with sub-lithographic diameters formed by block copolymer self-assemblyMILLWARD DAN B·Filed 2012·Granted Aug 20, 2013·20 cites·24 claims
- 2096US8409449B2Registered structure formation via the application of directed thermal energy to diblock copolymer filmsMILLWARD DAN B·Filed 2011·Granted Apr 2, 2013·24 cites·17 claims
- 2196US8372295B2Extensions of self-assembled structures to increased dimensions via a “bootstrap” self-templating methodMICRON TECHNOLOGY INC·Filed 2007·Granted Feb 12, 2013·31 cites·28 claims
- 2296US6607994B2Nanoparticle-based permanent treatments for textilesNANO TEX LLC·Filed 2000·Granted Aug 19, 2003·187 cites·17 claims
- 2396US6497733B1Dye fixativesNANO TEX LLC·Filed 2001·Granted Dec 24, 2002·36 cites·10 claims
- 2495US8993088B2Polymeric materials in self-assembled arrays and semiconductor structures comprising polymeric materialsMICRON TECHNOLOGY INC·Filed 2013·Granted Mar 31, 2015·14 cites·17 claims
- 2595US8669645B2Semiconductor structures including polymer material permeated with metal oxideMILLWARD DAN B·Filed 2011·Granted Mar 11, 2014·16 cites·20 claims
- 2695US8609221B2Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfacesMILLWARD DAN B·Filed 2010·Granted Dec 17, 2013·18 cites·29 claims
- 2795US8518275B2Graphoepitaxial self-assembly of arrays of downward facing half-cylindersMILLWARD DAN B·Filed 2012·Granted Aug 27, 2013·15 cites·19 claims
- 2895US8450418B2Methods of forming block copolymers, and block copolymer compositionsMILLWARD DAN B·Filed 2012·Granted May 28, 2013·14 cites·19 claims
- 2995US8445592B2Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxideMILLWARD DAN B·Filed 2011·Granted May 21, 2013·19 cites·21 claims
- 3095US8394483B2Two-dimensional arrays of holes with sub-lithographic diameters formed by block copolymer self-assemblyMILLWARD DAN B·Filed 2007·Granted Mar 12, 2013·25 cites·28 claims
- 3194US9087699B2Methods of forming an array of openings in a substrate, and related methods of forming a semiconductor device structureMICRON TECHNOLOGY INC·Filed 2012·Granted Jul 21, 2015·14 cites·21 claims
- 3294US8801894B2Sub-10 NM line features via rapid graphoepitaxial self-assembly of amphiphilic monolayersMILLWARD DAN B·Filed 2010·Granted Aug 12, 2014·11 cites·26 claims
- 3394US8784974B2Sub-10 NM line features via rapid graphoepitaxial self-assembly of amphiphilic monolayersMILLWARD DAN B·Filed 2012·Granted Jul 22, 2014·12 cites·21 claims
- 3494US8557128B2Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayersMILLWARD DAN B·Filed 2007·Granted Oct 15, 2013·19 cites·32 claims
- 3594US8404124B2Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfacesMILLWARD DAN B·Filed 2007·Granted Mar 26, 2013·26 cites·22 claims
- 3694US8101261B2One-dimensional arrays of block copolymer cylinders and applications thereofMILLWARD DAN B·Filed 2008·Granted Jan 24, 2012·58 cites·48 claims
- 3792US8956713B2Methods of forming a stamp and a stampMILLWARD DAN B·Filed 2011·Granted Feb 17, 2015·10 cites·7 claims
- 3891US8999492B2Method to produce nanometer-sized features with directed assembly of block copolymersMILLWARD DAN B·Filed 2008·Granted Apr 7, 2015·14 cites·16 claims
- 3991US7572731B2Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including sameMICRON TECHNOLOGY INC·Filed 2005·Granted Aug 11, 2009·14 cites·59 claims
- 4091US7439338B2Beta-diketiminate ligand sources and metal-containing compounds thereof, and systems and methods including sameMICRON TECHNOLOGY INC·Filed 2005·Granted Oct 21, 2008·13 cites·20 claims
- 4190US9257256B2Templates including self-assembled block copolymer filmsMICRON TECHNOLOGY INC·Filed 2013·Granted Feb 9, 2016·5 cites·18 claims
- 4290US8642157B2One-dimensional arrays of block copolymer cylinders and applications thereofMILLWARD DAN B·Filed 2011·Granted Feb 4, 2014·14 cites·28 claims
- 4390US8455082B2Polymer materials for formation of registered arrays of cylindrical poresMILLWARD DAN B·Filed 2012·Granted Jun 4, 2013·10 cites·20 claims
- 4488US10153200B2Methods of forming a nanostructured polymer material including block copolymer materialsMICRON TECHNOLOGY INC·Filed 2016·Granted Dec 11, 2018·3 cites·17 claims
- 4588US7300873B2Systems and methods for forming metal-containing layers using vapor deposition processesMICRON TECHNOLOGY INC·Filed 2004·Granted Nov 27, 2007·32 cites·64 claims
- 4687US9276059B2Semiconductor device structures including metal oxide structuresMICRON TECHNOLOGY INC·Filed 2014·Granted Mar 1, 2016·5 cites·9 claims
- 4787US6516633B1Photochromic glass nanoparticles and methods of preparationNANO TEX LLC·Filed 2001·Granted Feb 11, 2003·16 cites·6 claims
- 4886US9293328B2Semiconductor device structures comprising a polymer bonded to a base material and methods of fabricationMICRON TECHNOLOGY INC·Filed 2014·Granted Mar 22, 2016·5 cites·19 claims
- 4986US9229328B2Methods of forming semiconductor device structures, and related semiconductor device structuresMICRON TECHNOLOGY INC·Filed 2013·Granted Jan 5, 2016·5 cites·19 claims
- 5085US9418848B2Methods of forming patterns with a mask formed utilizing a brush layerMICRON TECHNOLOGY INC·Filed 2015·Granted Aug 16, 2016·4 cites·16 claims
Showing the top 50 of 117 patent records by PatentIndex Score.
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