Inventor · disambiguated record
Mark Kennard
Also filed as: KENNARD MARK · KENNARD MARK A · KENNARD MARK ALLEN
12 granted patents·1 pending application·242 citations·filing 1998–2012
92Inventor score
Top patents by PatentIndex Score
13 records- 0194US6669783B2High temperature electrostatic chuckLAM RES CORP·Filed 2001·Granted Dec 30, 2003·92 cites·29 claims
- 0292US7608526B2Strained layers within semiconductor buffer structuresASM INC·Filed 2006·Granted Oct 27, 2009·18 cites·39 claims
- 0389US7825401B2Strained layers within semiconductor buffer structuresASM INC·Filed 2009·Granted Nov 2, 2010·12 cites·28 claims
- 0484US7772127B2Semiconductor heterostructure and method for forming sameSOITEC SILICON ON INSULATOR·Filed 2005·Granted Aug 10, 2010·9 cites·18 claims
- 0578US9093271B2Method for manufacturing a thick epitaxial layer of gallium nitride on a silicon or similar substrate and layer obtained using said methodSCHENK DAVID·Filed 2012·Granted Jul 28, 2015·9 cites·12 claims
- 0676US6567258B2High temperature electrostatic chuckLAM RES CORP·Filed 2002·Granted May 20, 2003·17 cites·12 claims
- 0775US8084784B2Semiconductor heterostructure and method for forming sameFIGUET CHRISTOPHE·Filed 2010·Granted Dec 27, 2011·3 cites·16 claims
- 0875US6377437B1High temperature electrostatic chuckLAM RES CORP·Filed 1999·Granted Apr 23, 2002·41 cites·27 claims
- 0968US5935874ATechniques for forming trenches in a silicon layer of a substrate in a high density plasma processing systemLAM RES CORP·Filed 1998·Granted Aug 10, 1999·36 cites·18 claims
- 1067US7572331B2Method of manufacturing a waferSOITEC SILICON ON INSULATOR·Filed 2006·Granted Aug 11, 2009·2 cites·22 claims
- 1151US8778777B2Method for manufacturing a heterostructure aiming at reducing the tensile stress condition of a donor substrateKENNARD MARK·Filed 2009·Granted Jul 15, 2014·1 cites·11 claims
- 1249US7407548B2Method of manufacturing a waferSOITEC SILICON ON INSULATOR·Filed 2004·Granted Aug 5, 2008·2 cites·20 claims
- 1346US2012015497A1Preparing a Surface of a Sapphire Substrate for Fabricating HeterostructuresGAUDIN GWELTAZ·Filed 2009·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →