Inventor · disambiguated record
Eric A. Pape
Also filed as: PAPE ERIC · PAPE ERIC A
38 granted patents·16 pending applications·207 citations·filing 2001–2025
97Inventor score
Files withLAM RES CORP49ALBAREDE LUC1CALIFORNIA INST OF TECHN1KADKHODAYAN BOBBY1VENUGOPAL VIJAYAKUMAR C1
Top patents by PatentIndex Score
54 records- 0196US6813097B2Lenses capable of post-fabrication modulus changeCALIFORNIA INST OF TECHN·Filed 2002·Granted Nov 2, 2004·64 cites·14 claims
- 0293US10340171B2Permanent secondary erosion containment for electrostatic chuck bondsLAM RES CORP·Filed 2016·Granted Jul 2, 2019·7 cites·11 claims
- 0393US8358416B2Methods and apparatus for normalizing optical emission spectraLAM RES CORP·Filed 2012·Granted Jan 22, 2013·11 cites·19 claims
- 0492US10049948B2Power switching system for ESC with array of thermal control elementsLAM RES CORP·Filed 2012·Granted Aug 14, 2018·14 cites·19 claims
- 0592US8852964B2Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basisLAM RES CORP·Filed 2013·Granted Oct 7, 2014·14 cites·18 claims
- 0690US9779974B2System and method for reducing temperature transition in an electrostatic chuckLAM RES CORP·Filed 2015·Granted Oct 3, 2017·6 cites·18 claims
- 0789US11430688B2Two-stage pin lifter for de-chuck operationsLAM RES CORP·Filed 2018·Granted Aug 30, 2022·6 cites·19 claims
- 0889US8522716B2Protective coating for a plasma processing chamber part and a method of useKADKHODAYAN BOBBY·Filed 2009·Granted Sep 3, 2013·21 cites·16 claims
- 0988US7884925B2Electrical and optical system and methods for monitoring erosion of electrostatic chuck edge bead materialsLAM RES CORP·Filed 2008·Granted Feb 8, 2011·9 cites·14 claims
- 1086US8144328B2Methods and apparatus for normalizing optical emission spectraVENUGOPAL VIJAYAKUMAR C·Filed 2009·Granted Mar 27, 2012·15 cites·19 claims
- 1185US10707110B2Matched TCR joule heater designs for electrostatic chucksLAM RES CORP·Filed 2016·Granted Jul 7, 2020·3 cites·14 claims
- 1285US10690414B2Multi-plane heater for semiconductor substrate supportLAM RES CORP·Filed 2015·Granted Jun 23, 2020·5 cites·41 claims
- 1383US8473089B2Methods and apparatus for predictive preventive maintenance of processing chambersALBAREDE LUC·Filed 2010·Granted Jun 25, 2013·8 cites·18 claims
- 1481US10096506B2Reducing temperature transition in a substrate supportLAM RES CORP·Filed 2018·Granted Oct 9, 2018·2 cites·20 claims
- 1581US9012243B2Controlling CD and CD uniformity with trim time and temperature on a wafer by wafer basisLAM RES CORP·Filed 2014·Granted Apr 21, 2015·4 cites·15 claims
- 1678US10522377B2System and method for substrate support feed-forward temperature control based on RF powerLAM RES CORP·Filed 2016·Granted Dec 31, 2019·1 cites·14 claims
- 1777US7952694B2Optical system and methods for monitoring erosion of electrostatic chuck edge bead materialsLAM RES CORP·Filed 2010·Granted May 31, 2011·3 cites·16 claims
- 1875US2025263838A1Surface coating for plasma processing chamber componentsLAM RES CORP·Filed 2025·Application pending·0 cites
- 1974US9922855B2Method for reducing temperature transition in an electrostatic chuckLAM RES CORP·Filed 2017·Granted Mar 20, 2018·1 cites·14 claims
- 2073US10770363B2Power switching system for ESC with array of thermal control elementsLAM RES CORP·Filed 2018·Granted Sep 8, 2020·1 cites·20 claims
- 2173US10381248B2Auto-correction of electrostatic chuck temperature non-uniformityLAM RES CORP·Filed 2015·Granted Aug 13, 2019·2 cites·14 claims
- 2271US12020960B2Determining and controlling substrate temperature during substrate processingLAM RES CORP·Filed 2019·Granted Jun 25, 2024·2 cites·20 claims
- 2370US9716022B2Method of determining thermal stability of a substrate support assemblyLAM RES CORP·Filed 2013·Granted Jul 25, 2017·2 cites·21 claims
- 2469US10306776B1Substrate processing system printed-circuit control board assembly with one or more heater layersLAM RES CORP·Filed 2017·Granted May 28, 2019·1 cites·19 claims
- 2569US9435692B2Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature outputLAM RES CORP·Filed 2014·Granted Sep 6, 2016·2 cites·20 claims
- 2668US11384430B2Method for conditioning a ceramic coatingLAM RES CORP·Filed 2019·Granted Jul 12, 2022·0 cites·16 claims
- 2766US2021292893A1Surface coating for plasma processing chamber componentsLAM RES CORP·Filed 2019·Application pending·0 cites
- 2866US2023420281A1Reflectometer to monitor substrate movementLAM RES CORP·Filed 2023·Application pending·0 cites
- 2965US2025372351A1Refractory components for a semiconductor processing chamberLAM RES CORP·Filed 2023·Application pending·0 cites
- 3064US9543171B2Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control elementLAM RES CORP·Filed 2014·Granted Jan 10, 2017·1 cites·22 claims
- 3162US12249490B2Single crystal metal oxide plasma chamber componentLAM RES CORP·Filed 2020·Granted Mar 11, 2025·0 cites·11 claims
- 3262US10186437B2Substrate holder having integrated temperature measurement electrical devicesLAM RES CORP·Filed 2015·Granted Jan 22, 2019·1 cites·25 claims
- 3361US12387964B2Matched tcr joule heater designs for electrostatic chucksLAM RES CORP·Filed 2020·Granted Aug 12, 2025·0 cites·13 claims
- 3458US12074049B2Permanent secondary erosion containment for electrostatic chuck bondsLAM RES CORP·Filed 2019·Granted Aug 27, 2024·0 cites·14 claims
- 3557US2025191953A1Encapsulated compression washer for bonding ceramic plate and metal baseplate of electrostatic chucksLAM RES CORP·Filed 2023·Application pending·0 cites
- 3656US7907260B2Collimator arrangements including multiple collimators and implementation methods thereofLAM RES CORP·Filed 2007·Granted Mar 15, 2011·1 cites·35 claims
- 3753US11791189B2Reflectometer to monitor substrate movementLAM RES CORP·Filed 2018·Granted Oct 17, 2023·0 cites·29 claims
- 3853US10978323B2Substrate holder having integrated temperature measurement electrical devicesLAM RES CORP·Filed 2019·Granted Apr 13, 2021·0 cites·20 claims
- 3952US2023207278A1Atomic layer deposition coated powder coating for processing chamber componentsLAM RES CORP·Filed 2021·Application pending·0 cites
- 4051US2014065835A1Protective coating for a plasma processing chamber part and a method of useLAM RES CORP·Filed 2013·Application pending·0 cites
- 4150US10437236B2Method of determining thermal stability of a substrate support assemblyLAM RES CORP·Filed 2017·Granted Oct 8, 2019·0 cites·20 claims
- 4249US2024212991A1Yttrium aluminum perovskite (yap) based coatings for semiconductor processing chamber componentsLAM RES CORP·Filed 2022·Application pending·0 cites
- 4349US2023295798A1Metal oxide with low temperature fluorinationLAM RES CORP·Filed 2021·Application pending·0 cites
- 4448US11133211B2Ceramic baseplate with channels having non-square cornersLAM RES CORP·Filed 2018·Granted Sep 28, 2021·0 cites·16 claims
- 4548US10667379B2Connections between laminated heater and heater voltage inputsLAM RES CORP·Filed 2017·Granted May 26, 2020·0 cites·13 claims
- 4648US2023223240A1Matched chemistry component body and coating for semiconductor processing chamberLAM RES CORP·Filed 2021·Application pending·0 cites
- 4748US2023282450A1Remote plasma source showerhead assembly with aluminum fluoride plasma exposed surfaceLAM RES CORP·Filed 2021·Application pending·0 cites
- 4847US2023411124A1Ceramic component with channelsLAM RES CORP·Filed 2021·Application pending·0 cites
- 4943US2018240649A1Surface coating for plasma processing chamber componentsLAM RES CORP·Filed 2017·Application pending·0 cites
- 5042US10764966B2Laminated heater with different heater trace materialsLAM RES CORP·Filed 2017·Granted Sep 1, 2020·0 cites·14 claims
Showing the top 50 of 54 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →