Inventor · disambiguated record
Vasco Miguel Matias Serrao
Also filed as: MATIAS SERRAO VASCO MIGUEL
4 granted patents·3 citations·filing 2009–2014
60Inventor score
Technology areasG03F
Top patents by PatentIndex Score
4 records- 0172US8773637B2Lithographic apparatus and device manufacturing method of applying a pattern to a substrate using sensor and alignment markVAN DE KERKHOF MARCUS ADRIANUS·Filed 2010·Granted Jul 8, 2014·2 cites·16 claims
- 0254US9658541B2Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrateASML NETHERLANDS BV·Filed 2014·Granted May 23, 2017·0 cites·18 claims
- 0353US8427627B2Lithographic apparatus and methodsKIVITS KOEN·Filed 2009·Granted Apr 23, 2013·1 cites·25 claims
- 0427US8860928B2Lithographic apparatus, computer program product and device manufacturing methodPOSTMA SYTSE·Filed 2011·Granted Oct 14, 2014·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →