Inventor · disambiguated record

Christine Janowiak

Also filed as: JANOWIAK CHRISTINE · JANOWIAK CHRISTINE M

3 granted patents·176 citations·filing 1999–2002

77Inventor score

Technology areasH10P

Files withLAM RES CORP3

Top patents by PatentIndex Score

3 records

0190US6383931B1Convertible hot edge ring to improve low-K dielectric etchLAM RES CORP·Filed 2000·Granted May 7, 2002·59 cites·17 claims
0285US6696366B1Technique for etching a low capacitance dielectric layerLAM RES CORP·Filed 1999·Granted Feb 24, 2004·86 cites·28 claims
0384US6653734B2Convertible hot edge ring to improve low-K dielectric etchLAM RES CORP·Filed 2002·Granted Nov 25, 2003·31 cites·19 claims

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