Inventor · disambiguated record

Susan Ellingboe

Also filed as: ELLINGBOE SUSAN

4 granted patents·237 citations·filing 1998–2002

82Inventor score

Technology areasH10P

Files withLAM RES CORP4

Top patents by PatentIndex Score

4 records

0190US6383931B1Convertible hot edge ring to improve low-K dielectric etchLAM RES CORP·Filed 2000·Granted May 7, 2002·59 cites·17 claims
0285US6696366B1Technique for etching a low capacitance dielectric layerLAM RES CORP·Filed 1999·Granted Feb 24, 2004·86 cites·28 claims
0384US6653734B2Convertible hot edge ring to improve low-K dielectric etchLAM RES CORP·Filed 2002·Granted Nov 25, 2003·31 cites·19 claims
0480US6114250ATechniques for etching a low capacitance dielectric layer on a substrateLAM RES CORP·Filed 1998·Granted Sep 5, 2000·61 cites·20 claims

Join the waitlist — get patent alerts

Get an alert when Susan Ellingboe files or is granted a new patent.

We store only your email — no account needed. See our privacy policy.

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →