Inventor · disambiguated record
Shih-Yung Shieh
Also filed as: SHIEH SHIH-YUNG
3 granted patents·4 pending applications·1 citations·filing 2009–2018
46Inventor score
Top patents by PatentIndex Score
7 records- 0174US10208378B2Chemical vapor deposition apparatusHERMES EPITEK CORP·Filed 2016·Granted Feb 19, 2019·1 cites·12 claims
- 0254US10844490B2Vapor phase film deposition apparatusHERMES EPITEK CORP·Filed 2018·Granted Nov 24, 2020·0 cites·6 claims
- 0353US2015096496A1Vapor phase film deposition apparatusHERMES EPITEK CORP·Filed 2014·Application pending·0 cites
- 0442US2018119277A1Gas Distribution Apparatus for Deposition SystemHERMES EPITEK CORP·Filed 2016·Application pending·0 cites
- 0539US2010301236A1Shorten Temperature Recovery Time of Low Temperature Ion ImplantationSHIEH SHIH-YUNG·Filed 2009·Application pending·0 cites
- 0635US10801110B2Gas injector for semiconductor processes and film deposition apparatusHERMES EPITEK CORP·Filed 2017·Granted Oct 13, 2020·0 cites·15 claims
- 0727US2016240398A1Wafer HolderHERMES-EPITEK CORP·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →