Inventor · disambiguated record
Craig Macnaughton
Also filed as: MACNAUGHTON CRAIG · MACNAUGHTON CRAIG W
7 granted patents·66 citations·filing 2012–2015
81Inventor score
Top patents by PatentIndex Score
7 records- 0196US9087176B1Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process controlKLA TENCOR CORP·Filed 2014·Granted Jul 21, 2015·57 cites·20 claims
- 0275US9518932B2Metrology optimized inspectionKLA TENCOR CORP·Filed 2014·Granted Dec 13, 2016·2 cites·37 claims
- 0374US9029810B2Using wafer geometry to improve scanner correction effectiveness for overlay controlKLA TENCOR CORP·Filed 2014·Granted May 12, 2015·2 cites·20 claims
- 0473US10545412B2Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process controlKLA TENCOR CORP·Filed 2015·Granted Jan 28, 2020·2 cites·18 claims
- 0567US9513565B2Using wafer geometry to improve scanner correction effectiveness for overlay controlKLA TENCOR CORP·Filed 2015·Granted Dec 6, 2016·1 cites·19 claims
- 0661US9373165B2Enhanced patterned wafer geometry measurements based design improvements for optimal integrated chip fabrication performanceKLA TENCOR CORP·Filed 2014·Granted Jun 21, 2016·1 cites·26 claims
- 0756US9588441B2Method and device for using substrate geometry to determine optimum substrate analysis samplingMACNAUGHTON CRAIG W·Filed 2012·Granted Mar 7, 2017·1 cites·38 claims
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