Inventor · disambiguated record
Atsushi Kobaru
Also filed as: KOBARU ATSUSHI
14 granted patents·2 pending applications·137 citations·filing 1996–2015
91Inventor score
Top patents by PatentIndex Score
16 records- 0192US7187345B2Image forming method and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Mar 6, 2007·14 cites·6 claims
- 0290US8335397B2Charged particle beam apparatusTAKANE ATSUSHI·Filed 2008·Granted Dec 18, 2012·47 cites·7 claims
- 0389US7817105B2Image forming method and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Oct 19, 2010·9 cites·19 claims
- 0483US7763852B2Scanning electron microscope having time constant measurement capabilityHITACHI HIGH TECH CORP·Filed 2007·Granted Jul 27, 2010·8 cites·12 claims
- 0579US8274048B2Scanning electron microscope having time constant measurement capabilityIKEGAMI AKIRA·Filed 2010·Granted Sep 25, 2012·5 cites·5 claims
- 0677US8000939B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Aug 16, 2011·4 cites·13 claims
- 0776US6667483B2Apparatus using charged particle beamHITACHI LTD·Filed 2001·Granted Dec 23, 2003·13 cites·18 claims
- 0874US7045782B2Method of measurement accuracy improvement by control of pattern shrinkageHITACHI HIGH TECH CORP·Filed 2004·Granted May 16, 2006·9 cites·11 claims
- 0973US5614713AScanning electron microscopeHITACHI LTD·Filed 1996·Granted Mar 25, 1997·26 cites·10 claims
- 1066US7838840B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Nov 23, 2010·1 cites·9 claims
- 1165US8362426B2Scanning electron microscope and image signal processing methodHITACHI HIGH TECH CORP·Filed 2006·Granted Jan 29, 2013·1 cites·12 claims
- 1256US7288763B2Method of measurement accuracy improvement by control of pattern shrinkageHITACHI HIGH TECH CORP·Filed 2006·Granted Oct 30, 2007·0 cites·5 claims
- 1347US8203504B2Image forming method and charged particle beam apparatusKOBARU ATSUSHI·Filed 2010·Granted Jun 19, 2012·0 cites·12 claims
- 1445US2009194692A1Charged particle radiation apparatusKOBARU ATSUSHI·Filed 2009·Application pending·0 cites
- 1543US10840070B2Ion beam device and cleaning method for gas field ion sourceHITACHI HIGH TECH CORP·Filed 2015·Granted Nov 17, 2020·0 cites·16 claims
- 1642US2007200947A1Focus adjustment method and focus adjustment apparatusKOBARU ATSUSHI·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →