Inventor · disambiguated record
Fumitoshi Oikawa
Also filed as: OIKAWA FUMITOSHI
13 granted patents·7 pending applications·123 citations·filing 1999–2024
90Inventor score
Top patents by PatentIndex Score
20 records- 0183US6248009B1Apparatus for cleaning substrateEBARA CORP·Filed 2000·Granted Jun 19, 2001·30 cites·12 claims
- 0281US8226771B2Substrate processing apparatus and substrate processing methodOIKAWA FUMITOSHI·Filed 2007·Granted Jul 24, 2012·12 cites·11 claims
- 0381US6851152B2Substrate cleaning apparatusEBARA CORP·Filed 2001·Granted Feb 8, 2005·28 cites·16 claims
- 0479US9089881B2Method and apparatus for cleaning substrateWANG XINMING·Filed 2011·Granted Jul 28, 2015·5 cites·9 claims
- 0574US12205831B2Cleaning apparatus and polishing apparatusEBARA CORP·Filed 2024·Granted Jan 21, 2025·0 cites·12 claims
- 0669US11094548B2Apparatus for cleaning substrate and substrate cleaning methodEBARA CORP·Filed 2017·Granted Aug 17, 2021·1 cites·21 claims
- 0766US6651287B2Substrate cleaning apparatus and cleaning memberEBARA CORP·Filed 2001·Granted Nov 25, 2003·10 cites·9 claims
- 0866US2024082885A1Substrate cleaning device and method of cleaning substrateEBARA CORP·Filed 2023·Application pending·0 cites
- 0962US11948811B2Cleaning apparatus and polishing apparatusEBARA CORP·Filed 2020·Granted Apr 2, 2024·0 cites·22 claims
- 1061US2024321601A1Cleaning apparatus, substrate processing apparatus, and cleaning methodEBARA CORP·Filed 2024·Application pending·0 cites
- 1158US6412134B1Cleaning device and substrate cleaning apparatusEBARA CORP·Filed 1999·Granted Jul 2, 2002·23 cites·18 claims
- 1258US2022203411A1Substrate cleaning device and method of cleaning substrateEBARA CORP·Filed 2021·Application pending·0 cites
- 1356US6842933B2Substrate cleaning apparatus and cleaning memberEBARA CORP·Filed 2003·Granted Jan 18, 2005·5 cites·12 claims
- 1455US12370578B2Substrate cleaning apparatus and substrate cleaning methodEBARA CORP·Filed 2021·Granted Jul 29, 2025·0 cites·19 claims
- 1554USD710062SRoller shaft for semiconductor cleaningISHIBASHI TOMOATSU·Filed 2011·Granted Jul 29, 2014·9 cites·1 claims
- 1648US2022016651A1Substrate cleaning devices, substrate processing apparatus, substrate cleaning method, and nozzleEBARA CORP·Filed 2021·Application pending·0 cites
- 1747US12100587B2Substrate cleaning apparatus and cleaning method of substrateEBARA CORP·Filed 2020·Granted Sep 24, 2024·0 cites·18 claims
- 1843US2015287617A1Method and apparatus for cleaning substrateEBARA CORP·Filed 2015·Application pending·0 cites
- 1938US2002029431A1Substrate cleaning apparatusFiled 2001·Application pending·0 cites
- 2036US2013000671A1Substrate cleaning methodWANG XINMING·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →