Inventor · disambiguated record
Mohammadreza Hajiahmadi
Also filed as: HAJIAHMADI MOHAMMADREZA
11 granted patents·2 pending applications·11 citations·filing 2018–2024
82Inventor score
Files withASML NETHERLANDS BV13
Top patents by PatentIndex Score
13 records- 0194US10481506B2Method of measuring a structure, inspection apparatus, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Nov 19, 2019·7 cites·24 claims
- 0283US12105432B2Metrology method and associated computer productASML NETHERLANDS BV·Filed 2020·Granted Oct 1, 2024·2 cites·20 claims
- 0375US2024412067A1Metrology Apparatus And Method For Determining A Characteristic Of One Or More Structures On A SubstrateASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0474US11181828B2Method of determining a value of a parameter of interest of a patterning process, device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Nov 23, 2021·2 cites·20 claims
- 0567US11448974B2Metrology parameter determination and metrology recipe selectionASML NETHERLANDS BV·Filed 2021·Granted Sep 20, 2022·0 cites·22 claims
- 0666US2020050114A1Method of Measuring a Structure, Inspection Apparatus, Lithographic System and Device Manufacturing MethodASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
- 0759US12379670B2Substrate, patterning device and metrology apparatusesASML NETHERLANDS BV·Filed 2021·Granted Aug 5, 2025·0 cites·14 claims
- 0857US10990020B2Metrology parameter determination and metrology recipe selectionASML NETHERLANDS BV·Filed 2018·Granted Apr 27, 2021·0 cites·23 claims
- 0954US12112260B2Metrology apparatus and method for determining a characteristic of one or more structures on a substrateASML NETHERLANDS BV·Filed 2019·Granted Oct 8, 2024·0 cites·19 claims
- 1054US10794693B2Metrology method, apparatus and computer programASML NETHERLANDS BV·Filed 2018·Granted Oct 6, 2020·0 cites·12 claims
- 1150US11009345B2Metrology method, apparatus, and computer program to determine a representative sensitivity coefficientASML NETHERLANDS BV·Filed 2019·Granted May 18, 2021·0 cites·19 claims
- 1249US10451978B2Metrology parameter determination and metrology recipe selectionASML NETHERLANDS BV·Filed 2018·Granted Oct 22, 2019·0 cites·25 claims
- 1340US10705437B2Metrology method and apparatus, computer program and lithographic systemASML NETHERLANDS BV·Filed 2018·Granted Jul 7, 2020·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →