Inventor · disambiguated record
Klaus Mann
Also filed as: MANN KLAUS
3 granted patents·184 citations·filing 1998–2001
77Inventor score
Top patents by PatentIndex Score
3 records- 0195US6389045B1Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasersLAMBDA PHYSIK AG·Filed 2000·Granted May 14, 2002·87 cites·39 claims
- 0286US6014206AStabilization of angular and lateral laser beam positionLAMBDA PHYSIK GMBH·Filed 1998·Granted Jan 11, 2000·79 cites·43 claims
- 0373US6624424B2VUV laser beam characterization systemLAMBDA PHYSIK AG·Filed 2001·Granted Sep 23, 2003·18 cites·45 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →