Inventor · disambiguated record
Michael B. Petach
Also filed as: PETACH MICHAEL · PETACH MICHAEL B · PETACH MICHAEL BENEDICT
13 granted patents·1 pending application·255 citations·filing 1997–2017
93Inventor score
Files withNORTHROP GRUMMAN CORP4TRW INC4UNIV CENTRAL FLORIDA RES FOUND3NORTHROP GRUMMAN SPACE & MSN1NORTHROP GRUMMAN SYSTEMS CORP1
Top patents by PatentIndex Score
14 records- 0188US6324256B1Liquid sprays as the target for a laser-plasma extreme ultraviolet light sourceTRW INC·Filed 2000·Granted Nov 27, 2001·54 cites·8 claims
- 0277US6738452B2Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light sourceNORTHROP GRUMMAN CORP·Filed 2002·Granted May 18, 2004·28 cites·39 claims
- 0376US6792076B2Target steering system for EUV droplet generatorsNORTHROP GRUMMAN CORP·Filed 2002·Granted Sep 14, 2004·21 cites·18 claims
- 0471US6281607B1Electric motor with vibration attenuationTRW INC·Filed 1999·Granted Aug 28, 2001·24 cites·98 claims
- 0570US6835944B2Low vapor pressure, low debris solid target for EUV productionUNIV CENTRAL FLORIDA RES FOUND·Filed 2002·Granted Dec 28, 2004·15 cites·25 claims
- 0666US6744851B2Linear filament array sheet for EUV productionNORTHROP GRUMMAN CORP·Filed 2002·Granted Jun 1, 2004·11 cites·20 claims
- 0766US6657213B2High temperature EUV source nozzleNORTHROP GRUMMAN CORP·Filed 2001·Granted Dec 2, 2003·12 cites·11 claims
- 0864US6158983APump having muffler for attenuating noiseTRW INC·Filed 1998·Granted Dec 12, 2000·28 cites·100 claims
- 0963US6912267B2Erosion reduction for EUV laser produced plasma target sourcesUNIV CENTRAL FLORIDA RES FOUND·Filed 2002·Granted Jun 28, 2005·9 cites·22 claims
- 1063US5961309AGear pump with noise attenuationTRW INC·Filed 1997·Granted Oct 5, 1999·28 cites·42 claims
- 1157US7015605B1Electromotive drive system for use with a pump of a power-assisted steering system in a motor vehicleTRW AUTOMOTIVE ELECTRON & COMP·Filed 1999·Granted Mar 21, 2006·20 cites·26 claims
- 1255US6864497B2Droplet and filament target stabilizer for EUV source nozzlesUNIV CENTRAL FLORIDA RES FOUND·Filed 2002·Granted Mar 8, 2005·5 cites·26 claims
- 1351US2008173025A1Reduced volume gas spring or surge tank for cryocoolerNORTHROP GRUMMAN SPACE & MSN·Filed 2007·Application pending·0 cites
- 1450US10302071B2Toroidal spiral cascading of multiple heat engine stages in traveling wave thermoacoustic enginesNORTHROP GRUMMAN SYSTEMS CORP·Filed 2017·Granted May 28, 2019·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →