Inventor · disambiguated record
Chi-Fung Lo
Also filed as: LO CHI-FUNG
13 granted patents·6 pending applications·495 citations·filing 1994–2015
94Inventor score
Top patents by PatentIndex Score
19 records- 0188US6328927B1Method of making high-density, high-purity tungsten sputter targetsPRAXAIR TECHNOLOGY INC·Filed 1998·Granted Dec 11, 2001·83 cites·13 claims
- 0288US6056857ACryogenic annealing of sputtering targetsPRAXAIR TECHNOLOGY INC·Filed 1997·Granted May 2, 2000·83 cites·16 claims
- 0387US6042777AManufacturing of high density intermetallic sputter targetsSONY CORP·Filed 1999·Granted Mar 28, 2000·45 cites·37 claims
- 0487US5766380AMethod for fabricating randomly oriented aluminum alloy sputtering targets with fine grains and fine precipitatesSONY CORP·Filed 1996·Granted Jun 16, 1998·52 cites·6 claims
- 0585US6086735AContoured sputtering targetPRAXAIR TECHNOLOGY INC·Filed 1998·Granted Jul 11, 2000·47 cites·13 claims
- 0685US5896553ASingle phase tungsten-titanium sputter targets and method of producing sameSONY CORP·Filed 1996·Granted Apr 20, 1999·39 cites·12 claims
- 0782US6165413AMethod of making high density sputtering targetsPRAXAIR TECHNOLOGY INC·Filed 1999·Granted Dec 26, 2000·55 cites·25 claims
- 0880US5993575AMethod for fabricating randomly oriented aluminum alloy sputting targets with fine grains and fine precipitatesSONY CORP·Filed 1998·Granted Nov 30, 1999·44 cites·24 claims
- 0977US8206646B2Method for consolidating and diffusion-bonding powder metallurgy sputtering targetLO CHI-FUNG·Filed 2006·Granted Jun 26, 2012·4 cites·17 claims
- 1053US6299831B1High performance Cu/Cr sputter targets for semiconductor applicationPRAXAIR TECHNOLOGY INC·Filed 1999·Granted Oct 9, 2001·15 cites·13 claims
- 1151US2010012488A1Sputter target assembly having a low-temperature high-strength bondKOENIGSMANN HOLGER J·Filed 2008·Application pending·0 cites
- 1251US2010140084A1Method for production of aluminum containing targetsLO CHI-FUNG·Filed 2008·Application pending·0 cites
- 1349US6582641B1Apparatus and method for making metal oxide sputtering targetsPRAXAIR TECHNOLOGY INC·Filed 1994·Granted Jun 24, 2003·14 cites·15 claims
- 1449US5656216AMethod for making metal oxide sputtering targets (barrier powder envelope)SONY CORP·Filed 1994·Granted Aug 12, 1997·14 cites·25 claims
- 1549US2015162172A1Modified tungsten-titanium sputtering targetsLO CHI-FUNG·Filed 2014·Application pending·0 cites
- 1648US2008236738A1Bonded sputtering target and methods of manufactureLO CHI-FUNG·Filed 2007·Application pending·0 cites
- 1747US2012228131A1Method for consolidating and diffusion-bonding powder metallurgy sputtering targetLO CHI-FUNG·Filed 2012·Application pending·0 cites
- 1840US8097100B2Ternary aluminum alloy films and targets for manufacturing flat panel displaysSARKAR JAYDEEP·Filed 2006·Granted Jan 17, 2012·0 cites·2 claims
- 1927US2015248997A1Modified lithium cobalt oxide sputtering targetsLO CHI-FUNG·Filed 2015·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Chi-Fung Lo files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →