Inventor · disambiguated record
Pei-Jan Wang
Also filed as: WANG PEI-JAN
6 granted patents·175 citations·filing 1991–1997
85Inventor score
Top patents by PatentIndex Score
6 records- 0177US5180689ATapered opening sidewall with multi-step etching processTAIWAN SEMICONDUCTOR MFG·Filed 1991·Granted Jan 19, 1993·62 cites·20 claims
- 0273US5629237ATaper etching without re-entrance profileTAIWAN SEMICONDUCTOR MFG·Filed 1995·Granted May 13, 1997·53 cites·14 claims
- 0362US5776833AMethod for forming metal plugMOSEL VITELIC INC·Filed 1996·Granted Jul 7, 1998·32 cites·22 claims
- 0446US5770515AMethod of in-situ wafer cooling for a sequential WSI/alpha -Si sputtering processMOSEL VITELIC INC·Filed 1996·Granted Jun 23, 1998·18 cites·2 claims
- 0536US5963830AMethod of forming a TiN/W barrier layer for a hot Al plugMOSEL VITELIC INC·Filed 1997·Granted Oct 5, 1999·8 cites·5 claims
- 0629US5670016AMethod for cleaning substrate prior to tungsten depositionNAT SCIENCE COUNCIL·Filed 1995·Granted Sep 23, 1997·2 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Pei-Jan Wang files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →