Inventor · disambiguated record
Toshinobu Furusho
Also filed as: FURUSHO TOSHINOBU
16 granted patents·1 pending application·96 citations·filing 2003–2019
91Inventor score
Top patents by PatentIndex Score
17 records- 0190US6848625B2Process liquid supply mechanism and process liquid supply methodTOKYO ELECTRON LTD·Filed 2003·Granted Feb 1, 2005·58 cites·30 claims
- 0287US9846363B2Processing liquid supplying apparatus and method of supplying processing liquidTOKYO ELECTRON LTD·Filed 2014·Granted Dec 19, 2017·7 cites·4 claims
- 0385US11342198B2Processing liquid supplying apparatus and processing liquid supplying methodTOKYO ELECTRON LTD·Filed 2018·Granted May 24, 2022·3 cites·19 claims
- 0484US9162163B2Processing liquid supply method, processing liquid supply apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2013·Granted Oct 20, 2015·4 cites·14 claims
- 0583US11099480B2Treatment solution supply apparatus and treatment solution supply methodTOKYO ELECTRON LTD·Filed 2019·Granted Aug 24, 2021·3 cites·4 claims
- 0680US10734251B2Liquid processing apparatus, liquid processing method, and storage medium for liquid processTOKYO ELECTRON LTD·Filed 2013·Granted Aug 4, 2020·5 cites·8 claims
- 0779US9731226B2Solution treatment apparatus and solution treatment methodTOKYO ELECTRON LTD·Filed 2013·Granted Aug 15, 2017·3 cites·9 claims
- 0875US9732910B2Processing-liquid supply apparatus and processing-liquid supply methodTOKYO ELECTRON LTD·Filed 2014·Granted Aug 15, 2017·3 cites·20 claims
- 0974US10022652B2Solution treatment apparatus and solution treatment methodTOKYO ELECTRON LTD·Filed 2017·Granted Jul 17, 2018·1 cites·1 claims
- 1073US9878267B2Solution treatment apparatus and solution treatment methodTOKYO ELECTRON LTD·Filed 2017·Granted Jan 30, 2018·1 cites·4 claims
- 1172US10074546B2Processing liquid supplying apparatus and processing liquid supplying methodTOKYO ELECTRON LTD·Filed 2014·Granted Sep 11, 2018·2 cites·6 claims
- 1268US9975073B2Processing liquid supply method, processing liquid supply apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted May 22, 2018·1 cites·4 claims
- 1368US9372405B2Chemical liquid supply method and chemical liquid supply systemFURUSHO TOSHINOBU·Filed 2012·Granted Jun 21, 2016·3 cites·1 claims
- 1467US9086190B2Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatusFURUSHO TOSHINOBU·Filed 2011·Granted Jul 21, 2015·2 cites·12 claims
- 1551US10268116B2Processing liquid supplying apparatus and method of supplying processing liquidTOKYO ELECTRON LTD·Filed 2017·Granted Apr 23, 2019·0 cites·9 claims
- 1646US10035173B2Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Jul 31, 2018·0 cites·5 claims
- 1742US2013112628A1Treatment solution supply method, non-transitory computer storage medium and treatment solution supply apparatusTOKYO ELECTRON LTD·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →