Inventor · disambiguated record
Deh-Ming Shyu
Also filed as: SHYU DEH-MING
14 granted patents·3 pending applications·46 citations·filing 2003–2023
89Inventor score
Top patents by PatentIndex Score
17 records- 0176US8830458B2Measurement systems and measurement methodsIND TECH RES INST·Filed 2013·Granted Sep 9, 2014·4 cites·8 claims
- 0275US8250497B2Method for designing two-dimensional array overlay target sets and method and system for measuring overlay errors using the sameHSU WEI TE·Filed 2009·Granted Aug 21, 2012·11 cites·6 claims
- 0374US8321821B2Method for designing two-dimensional array overlay targets and method and system for measuring overlay errors using the sameKU YI SHA·Filed 2009·Granted Nov 27, 2012·4 cites·8 claims
- 0474US7864324B2Reflective scatterometerIND TECH RES INST·Filed 2009·Granted Jan 4, 2011·4 cites·20 claims
- 0569US7430052B2Method for correlating the line width roughness of gratings and method for measurementIND TECH RES INST·Filed 2007·Granted Sep 30, 2008·6 cites·17 claims
- 0668US7872741B2Method and apparatus for scatterfield microscopical measurementIND TECH RES INST·Filed 2008·Granted Jan 18, 2011·3 cites·2 claims
- 0768US7652776B2Structure and method for overlay measurementIND TECH RES INST·Filed 2007·Granted Jan 26, 2010·4 cites·11 claims
- 0864US8139233B2System and method for via structure measurementKU YI SHA·Filed 2010·Granted Mar 20, 2012·2 cites·21 claims
- 0963US8537213B2Method for measuring via bottom profileSHYU DEH-MING·Filed 2010·Granted Sep 17, 2013·2 cites·6 claims
- 1056US8319971B2Scatterfield microscopical measuring method and apparatusSHYU DEH-MING·Filed 2008·Granted Nov 27, 2012·1 cites·14 claims
- 1155US2024319494A1Large-angle laser scanning projection deviceSHENZHEN RAYTHINK AUTOMOTIVE ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 1248US7355713B2Method for inspecting a grating biochipIND TECH RES INST·Filed 2006·Granted Apr 8, 2008·0 cites·18 claims
- 1346US6724532B1Dual-lens hybrid diffractive/refractive imaging systemIND TECHNOLOGIES RES INST·Filed 2003·Granted Apr 20, 2004·3 cites·5 claims
- 1445US7800824B2Method for designing gratingsIND TECH RES INST·Filed 2007·Granted Sep 21, 2010·2 cites·9 claims
- 1544US9182681B2Method and system for measuring a stacking overlay error by focusing on one of upper and lower layer overlay marks using a differential interference contrast microscopeIND TECH RES INST·Filed 2012·Granted Nov 10, 2015·0 cites·4 claims
- 1641US2014333936A1Thickness measuring system and method for a bonding layerIND TECH RES INST·Filed 2014·Application pending·0 cites
- 1736US2011149063A1Measurement device and method of double-sided optical filmsIND TECH RES INST·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →