Inventor · disambiguated record
Cherng-Chang Tsuei
Also filed as: TSUEI CHERNG-CHANG
12 granted patents·154 citations·filing 1998–2015
89Inventor score
Technology areasH10P
Top patents by PatentIndex Score
12 records- 0191US9147767B2Semiconductor structure and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Sep 29, 2015·20 cites·20 claims
- 0288US9559190B2Semiconductor structure and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jan 31, 2017·7 cites·20 claims
- 0383US6423175B1Apparatus and method for reducing particle contamination in an etcherTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Jul 23, 2002·70 cites·11 claims
- 0478US9064741B1Uniformity in wafer patterning using feedback controlTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jun 23, 2015·3 cites·20 claims
- 0573US6117349AComposite shadow ring equipped with a sacrificial inner ringTAIWAN SEMICONDUCTOR MFG·Filed 1998·Granted Sep 12, 2000·51 cites·29 claims
- 0665US9384949B2Gas-flow control method for plasma apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jul 5, 2016·2 cites·18 claims
- 0758US9177875B2Advanced process control method for controlling width of spacer and dummy sidewall in semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Nov 3, 2015·1 cites·20 claims
- 0851US9362185B2Uniformity in wafer patterning using feedback controlTAIWAN SEMICONDUCTOR MFG·Filed 2015·Granted Jun 7, 2016·0 cites·20 claims
- 0948US9324578B2Hard mask reshapingTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Apr 26, 2016·0 cites·20 claims
- 1046US9412606B2Target dimension uniformity for semiconductor wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Aug 9, 2016·0 cites·20 claims
- 1146US9087793B2Method for etching target layer of semiconductor device in etching apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jul 21, 2015·0 cites·20 claims
- 1241US9613816B2Advanced process control method for controlling width of spacer and dummy sidewall in semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Apr 4, 2017·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →