Inventor · disambiguated record
Takumi Tokimitsu
Also filed as: TOKIMITSU TAKUMI
3 granted patents·11 pending applications·4 citations·filing 2007–2023
55Inventor score
Top patents by PatentIndex Score
14 records- 0157US8179520B2Optical element, projection optical system, exposure apparatus, and device fabrication methodTOKIMITSU TAKUMI·Filed 2009·Granted May 15, 2012·2 cites·12 claims
- 0257US2024075627A1Three-dimensional measuring apparatus, three-dimensional measuring method, storage medium, system, and method for manufacturing an articleCANON KK·Filed 2023·Application pending·0 cites
- 0356US8797542B2Measurement apparatusTOKIMITSU TAKUMI·Filed 2011·Granted Aug 5, 2014·2 cites·7 claims
- 0438US8437004B2Detection apparatusSUMIYOSHI YUHEI·Filed 2010·Granted May 7, 2013·0 cites·13 claims
- 0538US2009041934A1Method for manufacturing projection opticsCANON KK·Filed 2008·Application pending·0 cites
- 0637US2020278197A1Measurement apparatus, measurement method, system, storage medium, and information processing apparatusCANON KK·Filed 2020·Application pending·0 cites
- 0737US2007246356A1Sputtering apparatusTOKIMITSU TAKUMI·Filed 2007·Application pending·0 cites
- 0835US2019325593A1Image processing apparatus, system, method of manufacturing article, image processing method, and non-transitory computer-readable storage mediumCANON KK·Filed 2019·Application pending·0 cites
- 0933US2013194582A1Multiwavelength interferometerCANON KK·Filed 2013·Application pending·0 cites
- 1033US2016300356A1Measurement device that measures shape of object to be measured, measurement method, system, and article production methodCANON KK·Filed 2016·Application pending·0 cites
- 1132US2016273913A1Measurement apparatusCANON KK·Filed 2016·Application pending·0 cites
- 1230US2017307366A1Projection device, measuring apparatus, and article manufacturing methodCANON KK·Filed 2017·Application pending·0 cites
- 1329US2013070256A1Measuring apparatusTOKIMITSU TAKUMI·Filed 2012·Application pending·0 cites
- 1428US2016253815A1Measurement apparatusCANON KK·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →