Inventor · disambiguated record
Alexander N. Bykanov
Also filed as: BYKANOV ALEXANDER · BYKANOV ALEXANDER N
44 granted patents·1 pending application·1,009 citations·filing 2003–2022
98Inventor score
Top patents by PatentIndex Score
45 records- 0198US7671349B2Laser produced plasma EUV light sourceCYMER INC·Filed 2007·Granted Mar 2, 2010·54 cites·32 claims
- 0298US7655925B2Gas management system for a laser-produced-plasma EUV light sourceCYMER INC·Filed 2007·Granted Feb 2, 2010·43 cites·20 claims
- 0398US7491954B2Drive laser delivery systems for EUV light sourceCYMER INC·Filed 2006·Granted Feb 17, 2009·84 cites·60 claims
- 0498US7439530B2LPP EUV light source drive laser systemCYMER INC·Filed 2005·Granted Oct 21, 2008·76 cites·44 claims
- 0598US7372056B2LPP EUV plasma source material target delivery systemCYMER INC·Filed 2005·Granted May 13, 2008·109 cites·21 claims
- 0697US8198615B2Gas management system for a laser-produced-plasma EUV light sourceBYKANOV ALEXANDER N·Filed 2010·Granted Jun 12, 2012·21 cites·20 claims
- 0797US7872245B2Systems and methods for target material delivery in a laser produced plasma EUV light sourceCYMER INC·Filed 2008·Granted Jan 18, 2011·90 cites·25 claims
- 0895US10034362B2Plasma-based light sourceKLA TENCOR CORP·Filed 2015·Granted Jul 24, 2018·11 cites·45 claims
- 0994US7916388B2Drive laser for EUV light sourceCYMER INC·Filed 2007·Granted Mar 29, 2011·38 cites·20 claims
- 1094US7109503B1Systems for protecting internal components of an EUV light source from plasma-generated debrisCYMER INC·Filed 2005·Granted Sep 19, 2006·25 cites·20 claims
- 1193US10959318B2X-ray metrology system with broadband laser produced plasma illuminatorKLA TENCOR CORP·Filed 2018·Granted Mar 23, 2021·6 cites·20 claims
- 1293US8704200B2Laser produced plasma EUV light sourceBYKANOV ALEXANDER N·Filed 2012·Granted Apr 22, 2014·11 cites·20 claims
- 1393US7812329B2System managing gas flow between chambers of an extreme ultraviolet (EUV) photolithography apparatusCYMER INC·Filed 2007·Granted Oct 12, 2010·45 cites·21 claims
- 1493US7449703B2Method and apparatus for EUV plasma source target delivery target material handlingCYMER INC·Filed 2005·Granted Nov 11, 2008·45 cites·54 claims
- 1593US7378673B2Source material dispenser for EUV light sourceCYMER INC·Filed 2006·Granted May 27, 2008·43 cites·20 claims
- 1692US9544984B2System and method for generation of extreme ultraviolet lightKLA TENCOR CORP·Filed 2014·Granted Jan 10, 2017·10 cites·25 claims
- 1792US8035092B2Laser produced plasma EUV light sourceCYMER INC·Filed 2010·Granted Oct 11, 2011·7 cites·19 claims
- 1892US7465946B2Alternative fuels for EUV light sourceCYMER INC·Filed 2006·Granted Dec 16, 2008·40 cites·32 claims
- 1991US8633459B2Systems and methods for optics cleaning in an EUV light sourceBYKANOV ALEXANDER N·Filed 2011·Granted Jan 21, 2014·11 cites·20 claims
- 2091US8461560B2LPP EUV light source drive laser systemERSHOV ALEXANDER I·Filed 2011·Granted Jun 11, 2013·9 cites·24 claims
- 2191US7482609B2LPP EUV light source drive laser systemCYMER INC·Filed 2005·Granted Jan 27, 2009·37 cites·43 claims
- 2290US12133318B2Rotating target for extreme ultraviolet source with liquid metalKLA CORP·Filed 2022·Granted Oct 29, 2024·1 cites·21 claims
- 2390US10359377B2Beam shaping slit for small spot size transmission small angle X-ray scatterometryKLA TENCOR CORP·Filed 2017·Granted Jul 23, 2019·5 cites·20 claims
- 2489US8519366B2Debris protection system having a magnetic field for an EUV light sourceBYKANOV ALEXANDER N·Filed 2008·Granted Aug 27, 2013·26 cites·23 claims
- 2589US7589337B2LPP EUV plasma source material target delivery systemCYMER INC·Filed 2008·Granted Sep 15, 2009·23 cites·11 claims
- 2688US7476886B2Source material collection unit for a laser produced plasma EUV light sourceCYMER INC·Filed 2006·Granted Jan 13, 2009·24 cites·26 claims
- 2787US7002168B2Dense plasma focus radiation sourceCYMER INC·Filed 2003·Granted Feb 21, 2006·29 cites·72 claims
- 2885US10816486B2Multilayer targets for calibration and alignment of X-ray based measurement systemsKLA TENCOR CORP·Filed 2019·Granted Oct 27, 2020·2 cites·28 claims
- 2985US9989758B2Debris protection system for reflective optic utilizing gas flowKLA TENCOR CORP·Filed 2014·Granted Jun 5, 2018·6 cites·54 claims
- 3084US7355191B2Systems and methods for cleaning a chamber window of an EUV light sourceCYMER INC·Filed 2005·Granted Apr 8, 2008·20 cites·23 claims
- 3183US11073487B2Methods and systems for characterization of an x-ray beam with high spatial resolutionKLA TENCOR CORP·Filed 2018·Granted Jul 27, 2021·3 cites·35 claims
- 3282US9295147B2EUV light source using cryogenic droplet targets in mask inspectionKLA TENCOR CORP·Filed 2014·Granted Mar 22, 2016·5 cites·29 claims
- 3382US8017924B2Drive laser delivery systems for EUV light sourceCYMER INC·Filed 2009·Granted Sep 13, 2011·13 cites·25 claims
- 3481US9420678B2System and method for producing an exclusionary buffer gas flow in an EUV light sourceKLA TENCOR CORP·Filed 2014·Granted Aug 16, 2016·5 cites·18 claims
- 3581US7928417B2LPP EUV light source drive laser systemCYMER INC·Filed 2008·Granted Apr 19, 2011·11 cites·20 claims
- 3677US7518787B2Drive laser for EUV light sourceCYMER INC·Filed 2006·Granted Apr 14, 2009·11 cites·19 claims
- 3768US10880979B2Droplet generation for a laser produced plasma light sourceKLA TENCOR CORP·Filed 2016·Granted Dec 29, 2020·1 cites·14 claims
- 3868US8314398B2EUV light source components and methods for producing, using and refurbishing sameBOWERING NORBERT R·Filed 2011·Granted Nov 20, 2012·2 cites·23 claims
- 3967US11343899B2Droplet generation for a laser produced plasma light sourceKLA CORP·Filed 2020·Granted May 24, 2022·0 cites·19 claims
- 4065US7402825B2LPP EUV drive laser input systemCYMER INC·Filed 2005·Granted Jul 22, 2008·6 cites·71 claims
- 4161US9000404B2Systems and methods for optics cleaning in an EUV light sourceCymer LLC·Filed 2013·Granted Apr 7, 2015·1 cites·16 claims
- 4256US7741626B2Spectral purity filters and methods thereforCYMER INC·Filed 2008·Granted Jun 22, 2010·0 cites·20 claims
- 4341US11635700B2Method and apparatus for EUV mask inspectionKLA CORP·Filed 2021·Granted Apr 25, 2023·0 cites·19 claims
- 4441US9713239B2Laser produced plasma EUV light sourceHANSSON BJORN A M·Filed 2010·Granted Jul 18, 2017·0 cites·20 claims
- 4536US2006255298A1Laser produced plasma EUV light source with pre-pulseCYMER INC·Filed 2006·Application pending·0 cites
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