Inventor · disambiguated record
Toshio Ueta
Also filed as: UETA TOSHIO
7 granted patents·2 pending applications·134 citations·filing 2000–2008
86Inventor score
Top patents by PatentIndex Score
9 records- 0190US6686991B1Wafer stage assembly, servo control system, and method for operating the sameNIKON CORP·Filed 2000·Granted Feb 3, 2004·44 cites·38 claims
- 0288US7417714B2Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stageNIKON CORP·Filed 2005·Granted Aug 26, 2008·10 cites·25 claims
- 0387US6523695B1Method and apparatus for operating a vibration isolation system having electronic and pneumatic control systemsNIKON CORP·Filed 2000·Granted Feb 25, 2003·27 cites·25 claims
- 0487US6504162B1Stage device, control system, and method for stabilizing wafer stage and wafer tableNIKON CORP·Filed 2000·Granted Jan 7, 2003·31 cites·41 claims
- 0578US6618120B2Devices and methods for compensating for tilting of a leveling table in a microlithography apparatusNIKON CORP·Filed 2001·Granted Sep 9, 2003·20 cites·30 claims
- 0668US8582080B2Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stageBINNARD MICHAEL·Filed 2008·Granted Nov 12, 2013·2 cites·24 claims
- 0741US6963821B2Stage counter mass systemNIKON CORP·Filed 2003·Granted Nov 8, 2005·0 cites·39 claims
- 0835US2003102722A1Moving magnet type planar motor controlFiled 2001·Application pending·0 cites
- 0934US2003102721A1Moving coil type planar motor controlFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →