Inventor · disambiguated record
Hiroaki Dewa
Also filed as: DEWA HIROAKI
3 granted patents·1 citations·filing 2013–2023
45Inventor score
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0161US12344936B2Liquid raw material supplying method and gas supply apparatusTOKYO ELECTRON LTD·Filed 2023·Granted Jul 1, 2025·0 cites·10 claims
- 0258US9766617B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Sep 19, 2017·1 cites·6 claims
- 0346US11621185B2Semiconductor manufacturing apparatus and method for transferring waferTOKYO ELECTRON LTD·Filed 2021·Granted Apr 4, 2023·0 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →