Inventor · disambiguated record
Botho Hirschfeld
Also filed as: HIRSCHFELD BOTHO
8 granted patents·36 citations·filing 2001–2013
82Inventor score
Files withCASCADE MICROTECH INC3DIETRICH CLAUS1HIRSCHFELD BOTHO1KANEV STOJAN1KARL SUSS DRESDEN GMBH1
Top patents by PatentIndex Score
8 records- 0175US6688156B2Tester for pressure sensorsKARL SUSS DRESDEN GMBH·Filed 2001·Granted Feb 10, 2004·21 cites·24 claims
- 0274US9110131B2Method and device for contacting a row of contact areas with probe tipsDIETRICH CLAUS·Filed 2010·Granted Aug 18, 2015·5 cites·19 claims
- 0373US8344744B2Probe station for on-wafer-measurement under EMI-shieldingCASCADE MICROTECH INC·Filed 2010·Granted Jan 1, 2013·3 cites·9 claims
- 0470US9194885B2Modular prober and method for operating sameKANEV STOJAN·Filed 2011·Granted Nov 24, 2015·3 cites·11 claims
- 0562US8922229B2Method for measurement of a power deviceHIRSCHFELD BOTHO·Filed 2010·Granted Dec 30, 2014·2 cites·19 claims
- 0647US7282930B2Device for testing thin elementsSUSS MICROTEC TEST SYS GMBH·Filed 2005·Granted Oct 16, 2007·2 cites·24 claims
- 0743US9377423B2Systems and methods for handling substrates at below dew point temperaturesCASCADE MICROTECH INC·Filed 2013·Granted Jun 28, 2016·0 cites·23 claims
- 0843US9373533B2Systems and methods for providing wafer access in a wafer processing systemCASCADE MICROTECH INC·Filed 2013·Granted Jun 21, 2016·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →