Inventor · disambiguated record
Toshiharu Matsuzawa
Also filed as: MATSUZAWA TOSHIHARU
4 granted patents·143 citations·filing 1981–1988
80Inventor score
Technology areasG03F
Files withHITACHI LTD4
Top patents by PatentIndex Score
4 records- 0191US4904569AMethod of forming pattern and projection aligner for carrying out the sameHITACHI LTD·Filed 1988·Granted Feb 27, 1990·64 cites·5 claims
- 0281US4536421AMethod of forming a microscopic patternHITACHI LTD·Filed 1981·Granted Aug 20, 1985·37 cites·17 claims
- 0375US4670650AMethod of measuring resist patternHITACHI LTD·Filed 1985·Granted Jun 2, 1987·26 cites·11 claims
- 0460US4614706AMethod of forming a microscopic pattern with far UV pattern exposure, alkaline solution development, and dry etchingHITACHI LTD·Filed 1984·Granted Sep 30, 1986·16 cites·31 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →