Inventor · disambiguated record
Sure Ngo
Also filed as: NGO SURE · NGO SURE K
8 granted patents·1 pending application·7 citations·filing 2010–2021
77Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0189US11621162B2Systems and methods for forming UV-cured low-κ dielectric filmsAPPLIED MATERIALS INC·Filed 2020·Granted Apr 4, 2023·2 cites·20 claims
- 0289US11600486B2Systems and methods for depositing low-κdielectric filmsAPPLIED MATERIALS INC·Filed 2020·Granted Mar 7, 2023·2 cites·20 claims
- 0374US9391024B2Multi-layer dielectric stack for plasma damage protectionAPPLIED MATERIALS INC·Filed 2015·Granted Jul 12, 2016·2 cites·20 claims
- 0461US9324571B2Post treatment for dielectric constant reduction with pore generation on low K dielectric filmsAPPLIED MATERIALS INC·Filed 2014·Granted Apr 26, 2016·1 cites·20 claims
- 0560US12119223B2Single precursor low-k film deposition and UV cure for advanced technology nodeAPPLIED MATERIALS INC·Filed 2021·Granted Oct 15, 2024·0 cites·20 claims
- 0653US11572622B2Systems and methods for cleaning low-k deposition chambersAPPLIED MATERIALS INC·Filed 2020·Granted Feb 7, 2023·0 cites·20 claims
- 0749US9165998B2Adhesion layer to minimize dielectric constant increase with good adhesion strength in a PECVD processAPPLIED MATERIALS INC·Filed 2014·Granted Oct 20, 2015·0 cites·18 claims
- 0838US8349746B2Microelectronic structure including a low k dielectric and a method of controlling carbon distribution in the structureAPPLIED MATERIALS INC·Filed 2010·Granted Jan 8, 2013·0 cites·8 claims
- 0934US2012156890A1In-situ low-k capping to improve integration damage resistanceYIM KANG SUB·Filed 2011·Application pending·0 cites
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