Inventor · disambiguated record

Ting-Hao Hsu

Also filed as: HSU TING-HAO

29 granted patents·4 pending applications·172 citations·filing 2008–2025

95Inventor score

Technology areasG03F H10P H10D B62J G01N

Files withTAIWAN SEMICONDUCTOR MFG CO LTD22 TAIWAN SEMICONDUCTOR MFG5 YU CHING-FANG2 LEE HSIN-CHANG1 LIN MEI-CHUN1

Top patents by PatentIndex Score

33 records

0197US8691476B2EUV mask and method for forming the sameYU CHING-FANG·Filed 2011·Granted Apr 8, 2014·128 cites·20 claims
0294US12013646B2High throughput and high position accurate method for particle inspection of mask podsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jun 18, 2024·2 cites·20 claims
0393US11411535B2Semiconductor device and operation method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 9, 2022·2 cites·20 claims
0492US11614691B2High throughput and high position accurate method for particle inspection of mask podsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Mar 28, 2023·2 cites·20 claims
0591US9658526B2Mask pellicle indicator for haze preventionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted May 23, 2017·9 cites·20 claims
0688US8980108B1Method for integrated circuit fabricationTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Mar 17, 2015·7 cites·20 claims
0787US10958216B2Semiconductor device and operation method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 23, 2021·3 cites·20 claims
0886US12393124B2High throughput and high position accurate method for particle inspection of mask podsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Aug 19, 2025·0 cites·20 claims
0986US9933699B2Pellicle aging estimation and particle removal from pellicle via acoustic wavesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Apr 3, 2018·3 cites·20 claims
1086US2025328086A1High throughput and high position accurate method for particle inspection of mask podsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
1185US9354510B2EUV mask and method for forming the sameTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted May 31, 2016·3 cites·20 claims
1283US10126644B2Pellicle for advanced lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Nov 13, 2018·2 cites·20 claims
1380US12140857B2Method of fast surface particle and scratch detection for EUV mask backsideTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Nov 12, 2024·0 cites·20 claims
1478US2024393673A1Method of fast surface particle and scratch detection for euv mask backsideTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
1575US11722099B2Semiconductor device and operation method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 8, 2023·0 cites·20 claims
1672US10520805B2System and method for localized EUV pellicle glue removalTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Dec 31, 2019·1 cites·20 claims
1772US9418847B2Lithography system and method for haze eliminationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Aug 16, 2016·2 cites·20 claims
1870US12429776B2Lithography method with reduced impacts of mask defectsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 30, 2025·0 cites·20 claims
1969US9305346B2Method and apparatus for efficient defect inspectionYU CHING-FANG·Filed 2012·Granted Apr 5, 2016·3 cites·14 claims
2069US9152035B2Lithographic photomask with inclined sidesTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Oct 6, 2015·1 cites·20 claims
2168US11768431B2Method of fast surface particle and scratch detection for EUV mask backsideTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Sep 26, 2023·0 cites·20 claims
2267US9548209B2Method for integrated circuit fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jan 17, 2017·1 cites·19 claims
2364US8737717B2Method and apparatus for defect identificationLIN MEI-CHUN·Filed 2012·Granted May 27, 2014·3 cites·20 claims
2463US11079669B2System and method for localized EUV pellicle glue removalTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 3, 2021·0 cites·20 claims
2563US10691017B2Pellicle for advanced lithographyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jun 23, 2020·0 cites·20 claims
2660US2024053676A1Inspection method for pellicle membrane of lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
2759US10955746B2Lithography method with reduced impacts of mask defectsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Mar 23, 2021·0 cites·20 claims
2855US11855099B2Metal-insulator-semiconductor tunnel diode memoryTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 26, 2023·0 cites·20 claims
2955US11591039B2Bicycle head and bicycle shift control boxTEKTRO TECHNOLOGY CORP·Filed 2021·Granted Feb 28, 2023·0 cites·18 claims
3055US8932958B2Device manufacturing and cleaning methodTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Jan 13, 2015·0 cites·20 claims
3146US8598042B1Device manufacturing and cleaning methodLU CHI-LUN·Filed 2012·Granted Dec 3, 2013·0 cites·20 claims
3246US2009258159A1Novel treatment for mask surface chemical reductionTAIWAN SEMICONDUCTOR MFG·Filed 2008·Application pending·0 cites
3345US8656318B2System and method for combined intraoverlay metrology and defect inspectionLEE HSIN-CHANG·Filed 2012·Granted Feb 18, 2014·0 cites·19 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →