Inventor · disambiguated record
Nobuo Tsumaki
Also filed as: TSUMAKI NOBUO
12 granted patents·2 pending applications·929 citations·filing 1983–2010
93Inventor score
Top patents by PatentIndex Score
14 records- 0197US4874273AApparatus for holding and/or conveying articles by fluidHITACHI LTD·Filed 1988·Granted Oct 17, 1989·419 cites·10 claims
- 0296US6618692B2Remote diagnostic system and method for semiconductor manufacturing equipmentHITACHI LTD·Filed 2001·Granted Sep 9, 2003·140 cites·9 claims
- 0396US5080195AMethod of supplying lubricant and apparatus for the sameHITACHI LTD·Filed 1989·Granted Jan 14, 1992·78 cites·13 claims
- 0496US4630942AGuiding apparatusHITACHI LTD·Filed 1985·Granted Dec 23, 1986·81 cites·2 claims
- 0582US4579508ATurbomolecular pumpHITACHI LTD·Filed 1983·Granted Apr 1, 1986·43 cites·6 claims
- 0681US5258047AHolder device and semiconductor producing apparatus having sameHITACHI LTD·Filed 1991·Granted Nov 2, 1993·73 cites·23 claims
- 0778US4602873AVibration-controlling bearingHITACHI LTD·Filed 1984·Granted Jul 29, 1986·29 cites·9 claims
- 0873US4593835ACryogenic liquefied pump systemHITACHI LTD·Filed 1984·Granted Jun 10, 1986·33 cites·10 claims
- 0960US6288368B1Vacuum heating furnace with tapered portionHITACHI LTD·Filed 2000·Granted Sep 11, 2001·6 cites·6 claims
- 1059US6186153B1Plasma treatment method and manufacturing method of semiconductor deviceHITACHI LTD·Filed 1998·Granted Feb 13, 2001·25 cites·16 claims
- 1142US7485874B2Apparatus for manufacturing semiconductor substratesSUMCO CORP·Filed 2006·Granted Feb 3, 2009·0 cites·14 claims
- 1242US2010192974A1Method for ultrasonic cleaning of contamination attached to a surface of an objectHITACHI PLANT TECHNOLOGIES LTD·Filed 2010·Application pending·0 cites
- 1337US2009025761A1Ultrasonic cleaning apparatusHITACHI PLANT TECHNOLOGIES LTD·Filed 2005·Application pending·0 cites
- 1431US6093911AVacuum heating furnace with tapered portionHITACHI LTD·Filed 1998·Granted Jul 25, 2000·2 cites·6 claims
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