Inventor · disambiguated record
Tzu-Heng Wu
Also filed as: WU TZU-HENG
11 granted patents·1 pending application·9 citations·filing 2014–2024
82Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD12
Top patents by PatentIndex Score
12 records- 0187US10609463B2Integrated microphone device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Mar 31, 2020·6 cites·20 claims
- 0276US10065852B2MEMS device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Sep 4, 2018·2 cites·20 claims
- 0372US10087071B2Semiconductor structure and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Oct 2, 2018·1 cites·19 claims
- 0464US11097941B2Method of fabricating semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 24, 2021·0 cites·20 claims
- 0561US2025389891A1Semiconductor photonics devices and methods of formationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0659US11184694B2Integrated microphone device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Nov 23, 2021·0 cites·20 claims
- 0759US9975754B2Semiconductor structure and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted May 22, 2018·0 cites·20 claims
- 0856US9656855B1Semiconductor structure and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted May 23, 2017·0 cites·20 claims
- 0955US10273140B2Substrate structure, semiconductor structure and method for fabricating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Apr 30, 2019·0 cites·20 claims
- 1047US9493346B2Capacitor with planarized bonding for CMOS-MEMS integrationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Nov 15, 2016·0 cites·21 claims
- 1147US9449867B2VHF etch barrier for semiconductor integrated microsystemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Sep 20, 2016·0 cites·20 claims
- 1246US9446945B2Isolation structure for MEMS 3D IC integrationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Sep 20, 2016·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →