Inventor · disambiguated record
Mario Laengle
Also filed as: LAENGLE MARIO
8 granted patents·3 pending applications·15 citations·filing 2010–2024
80Inventor score
Top patents by PatentIndex Score
11 records- 0183US10168539B2Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unitZEISS CARL AG·Filed 2018·Granted Jan 1, 2019·3 cites·12 claims
- 0283US9904060B2Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unitZEISS CARL AG·Filed 2014·Granted Feb 27, 2018·5 cites·38 claims
- 0378US8717581B2Method for determining the position of a structure within an image and position measuring device for carrying out the methodLAENGLE MARIO·Filed 2011·Granted May 6, 2014·5 cites·20 claims
- 0464US10578881B2Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unitZEISS CARL AG·Filed 2018·Granted Mar 3, 2020·0 cites·20 claims
- 0564US9366637B2Method for establishing distortion properties of an optical system in a microlithographic measurement systemZEISS CARL SMS GMBH·Filed 2014·Granted Jun 14, 2016·2 cites·14 claims
- 0656US2024393269A1Method and device for analysing an image of a microlithographic microstructured sampleZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0755US12158703B2Method for reproducing a target wavefront of an imaging optical production system, and metrology system for carrying out the methodZEISS CARL SMT GMBH·Filed 2022·Granted Dec 3, 2024·0 cites·20 claims
- 0853US11647288B2Device for measuring masks for microlithography and autofocusing methodZEISS CARL SMT GMBH·Filed 2020·Granted May 9, 2023·0 cites·34 claims
- 0949US2022365449A1Method for determining a registration errorZEISS CARL SMT GMBH·Filed 2022·Application pending·0 cites
- 1047US2022383485A1Method and apparatus for analyzing an image of a microlithographic microstructured componentZEISS CARL SMT GMBH·Filed 2022·Application pending·0 cites
- 1137US8970951B2Mask inspection microscope with variable illumination settingMATEJKA ULRICH·Filed 2010·Granted Mar 3, 2015·0 cites·51 claims
Join the waitlist — get patent alerts
Get an alert when Mario Laengle files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →