Inventor · disambiguated record
Jeffrey M. Lauerhaas
Also filed as: LAUERHAAS JEFFREY · LAUERHAAS JEFFREY M · LAUERHAAS JEFFREY MICHAEL
10 granted patents·5 pending applications·237 citations·filing 1997–2023
90Inventor score
Files withTEL FSI INC6LAUERHAAS JEFFREY M2AKRION TECHNOLOGIES INC1DOW CORNING1GOLDFINGER TECHNOLOGIES LLC1
Top patents by PatentIndex Score
15 records- 0194US5770022AMethod of making silica nanoparticlesDOW CORNING·Filed 1997·Granted Jun 23, 1998·100 cites·9 claims
- 0291US8235062B2Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operationLAUERHAAS JEFFREY M·Filed 2009·Granted Aug 7, 2012·18 cites·17 claims
- 0388US6754980B2Megasonic cleaner and dryerGOLDFINGER TECHNOLOGIES LLC·Filed 2002·Granted Jun 29, 2004·48 cites·36 claims
- 0480US5962132ASilica nanoparticles obtained from a method involving a direct current electric arc in an oxygen-containing atmosphereUNIV NORTHWESTERN·Filed 1998·Granted Oct 5, 1999·37 cites·8 claims
- 0579US8684015B2Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operationLAUERHAAS JEFFREY M·Filed 2012·Granted Apr 1, 2014·4 cites·9 claims
- 0672US6928751B2Megasonic cleaner and dryer systemIMEC INTER UNI MICRO ELECTR·Filed 2002·Granted Aug 16, 2005·14 cites·21 claims
- 0770US7100304B2Megasonic cleaner and dryerAKRION TECHNOLOGIES INC·Filed 2004·Granted Sep 5, 2006·15 cites·9 claims
- 0862US8871108B2Process for removing carbon material from substratesTEL FSI INC·Filed 2013·Granted Oct 28, 2014·1 cites·29 claims
- 0955US9039840B2Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operationTEL FSI INC·Filed 2013·Granted May 26, 2015·0 cites·5 claims
- 1051US2024404794A1Plasma processing method and apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1143US2014332034A1Process comprising water vapor for haze elimination and residue removalTEL FSI INC·Filed 2014·Application pending·0 cites
- 1240US2004231188A1Megasonic cleaner and dryerFiled 2004·Application pending·0 cites
- 1339US2018190517A1Recipe selectable dispense system and method of operatingTEL FSI INC·Filed 2017·Application pending·0 cites
- 1438US10748788B2System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid spraysTEL FSI INC·Filed 2018·Granted Aug 18, 2020·0 cites·19 claims
- 1530US2016284535A1Method for wet stripping silicon-containing organic layersTEL FSI INC·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →