Inventor · disambiguated record
Gary Hsueh
Also filed as: HSUEH GARY · HSUEH GARY C
4 granted patents·1 pending application·379 citations·filing 1997–2011
81Inventor score
Top patents by PatentIndex Score
5 records- 0197US6547977B1Method for etching low k dielectricsAPPLIED MATERIALS INC·Filed 2000·Granted Apr 15, 2003·320 cites·32 claims
- 0278US8769691B1Network traffic reductionHSUEH GARY·Filed 2011·Granted Jul 1, 2014·12 cites·24 claims
- 0368US7265382B2Method and apparatus employing integrated metrology for improved dielectric etch efficiencyAPPLIED MATERIALS INC·Filed 2002·Granted Sep 4, 2007·16 cites·10 claims
- 0464US5856906ABackside gas quick dump apparatus for a semiconductor wafer processing systemAPPLIED MATERIALS INC·Filed 1997·Granted Jan 5, 1999·31 cites·11 claims
- 0532US2003027427A1Integrated system for oxide etching and metal liner depositionAPPLIED MATERIALS INC·Filed 2001·Application pending·0 cites
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