Inventor · disambiguated record
Sun-Wung Lee
Also filed as: LEE SUN-WUNG
8 granted patents·5 pending applications·177 citations·filing 2001–2020
89Inventor score
Top patents by PatentIndex Score
13 records- 0195US6383882B1Method for fabricating MOS transistor using selective silicide processSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted May 7, 2002·113 cites·15 claims
- 0285US7081045B2Apparatus for polishing a semiconductor waferSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Jul 25, 2006·7 cites·22 claims
- 0384US6945861B2Polishing head of chemical mechanical polishing apparatus and polishing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2005·Granted Sep 20, 2005·8 cites·9 claims
- 0483US6652362B2Apparatus for polishing a semiconductor wafer and method thereforSAMSUNG ELECTRONICS CO LTD·Filed 2001·Granted Nov 25, 2003·21 cites·12 claims
- 0579US7223158B2Method for polishing a semiconductor waferSAMSUNG ELECTRONICS CO LTD·Filed 2006·Granted May 29, 2007·4 cites·10 claims
- 0674US6769973B2Polishing head of chemical mechanical polishing apparatus and polishing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Aug 3, 2004·12 cites·7 claims
- 0766US6921323B2Apparatus for polishing a semiconductor wafer and method thereforSAMSUNG ELECTRONICS CO LTD·Filed 2003·Granted Jul 26, 2005·7 cites·32 claims
- 0858US6881135B2Polishing head of chemical mechanical polishing apparatus and polishing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Apr 19, 2005·5 cites·22 claims
- 0955US2007232209A1Method for polishing a semiconductor waferSAMSUNG ELECTRONICS CO LTD·Filed 2007·Application pending·0 cites
- 1044US2021210353A1Method of processing substrate having polysilicon layer and system thereofXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2020·Application pending·0 cites
- 1144US2020203146A1Module and system for trimming wafer edgeXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Application pending·0 cites
- 1244US2020198090A1Cmp apparatus and method of performing ceria-based cmp processXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Application pending·0 cites
- 1343US2021114170A1Container for storing slurry having fumed silica particles and cmp apparatus having the sameXIA TAI XIN SEMICONDUCTOR QING DAO LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →