Inventor · disambiguated record
Satoru Fukuhara
Also filed as: FUKUHARA SATORU
30 granted patents·617 citations·filing 1974–2012
97Inventor score
Top patents by PatentIndex Score
30 records- 0193US6348690B1Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 1998·Granted Feb 19, 2002·51 cites·30 claims
- 0292US5608218AScanning electron microscopeHITACHI LTD·Filed 1994·Granted Mar 4, 1997·69 cites·22 claims
- 0390US4274035AField emission electron gunHITACHI LTD·Filed 1979·Granted Jun 16, 1981·28 cites·9 claims
- 0487US7012252B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2005·Granted Mar 14, 2006·5 cites·12 claims
- 0586US4600839ASmall-dimension measurement system by scanning electron beamHITACHI LTD·Filed 1984·Granted Jul 15, 1986·35 cites·4 claims
- 0685US6452178B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2001·Granted Sep 17, 2002·23 cites·16 claims
- 0785US5834781AElectron source and electron beam-emitting apparatus equipped with sameHITACHI LTD·Filed 1997·Granted Nov 10, 1998·46 cites·6 claims
- 0884US5616926ASchottky emission cathode and a method of stabilizing the sameHITACHI LTD·Filed 1995·Granted Apr 1, 1997·43 cites·50 claims
- 0983US5838096ACathode having a reservoir and method of manufacturing the sameHITACHI LTD·Filed 1996·Granted Nov 17, 1998·40 cites·8 claims
- 1081US4841191APiezoelectric actuator control apparatusHITACHI LTD·Filed 1988·Granted Jun 20, 1989·46 cites·9 claims
- 1180US7439506B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2007·Granted Oct 21, 2008·3 cites·30 claims
- 1277US4629889APotential analyzerHITACHI LTD·Filed 1984·Granted Dec 16, 1986·17 cites·6 claims
- 1376US3945698AMethod of stabilizing emitted electron beam in field emission electron gunHITACHI LTD·Filed 1974·Granted Mar 23, 1976·14 cites·10 claims
- 1475US4355232AApparatus for measuring specimen potential in electron microscopeHITACHI LTD·Filed 1980·Granted Oct 19, 1982·17 cites·11 claims
- 1574US6512227B2Method and apparatus for inspecting patterns of a semiconductor device with an electron beamHITACHI LTD·Filed 2001·Granted Jan 28, 2003·10 cites·17 claims
- 1674US4670652ACharged particle beam microprobe apparatusHITACHI LTD·Filed 1985·Granted Jun 2, 1987·19 cites·2 claims
- 1773US5162240AMethod and apparatus of fabricating electric circuit pattern on thick and thin film hybrid multilayer wiring substrateHITACHI LTD·Filed 1990·Granted Nov 10, 1992·47 cites·37 claims
- 1871US6987265B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2002·Granted Jan 17, 2006·9 cites·12 claims
- 1971US4868394ACharged particle detectorHITACHI LTD·Filed 1988·Granted Sep 19, 1989·16 cites·6 claims
- 2067US4554455APotential analyzerHITACHI LTD·Filed 1983·Granted Nov 19, 1985·19 cites·8 claims
- 2166US4581534AImage display system for a stroboscopic scanning electron microscopeHITACHI LTD·Filed 1983·Granted Apr 8, 1986·11 cites·1 claims
- 2260US8134125B2Method and apparatus of an inspection system using an electron beamIWABUCHI YUKO·Filed 2008·Granted Mar 13, 2012·0 cites·18 claims
- 2360US4605860AApparatus for focusing a charged particle beam onto a specimenHITACHI LTD·Filed 1984·Granted Aug 12, 1986·9 cites·6 claims
- 2459US7232996B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2005·Granted Jun 19, 2007·0 cites·12 claims
- 2557US8604430B2Method and an apparatus of an inspection system using an electron beamIWABUCHI YUKO·Filed 2012·Granted Dec 10, 2013·0 cites·6 claims
- 2651US4687931AScanning electron microscopeHITACHI LTD·Filed 1986·Granted Aug 18, 1987·7 cites·3 claims
- 2745US5093616AVoltage measurement method using electron beamHITACHI LTD·Filed 1990·Granted Mar 3, 1992·12 cites·7 claims
- 2844US4803430AMagnetic/electric field measuring device by means of an electron beamHITACHI LTD·Filed 1988·Granted Feb 7, 1989·8 cites·9 claims
- 2937US5111141AMagnetic field measurement optimization apparatus using a charged particle beamHITACHI LTD·Filed 1990·Granted May 5, 1992·7 cites·21 claims
- 3036US5160884ACharged particle beam deviceHITACHI LTD·Filed 1991·Granted Nov 3, 1992·6 cites·28 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →