Inventor · disambiguated record
Yuko Iwabuchi
Also filed as: IWABUCHI YUKO
14 granted patents·203 citations·filing 1996–2012
93Inventor score
Top patents by PatentIndex Score
14 records- 0193US6348690B1Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 1998·Granted Feb 19, 2002·51 cites·30 claims
- 0289US5894124AScanning electron microscope and its analogous deviceHITACHI LTD·Filed 1997·Granted Apr 13, 1999·61 cites·28 claims
- 0387US7012252B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2005·Granted Mar 14, 2006·5 cites·12 claims
- 0485US6452178B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2001·Granted Sep 17, 2002·23 cites·16 claims
- 0580US7439506B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2007·Granted Oct 21, 2008·3 cites·30 claims
- 0677US6541771B2Scanning electron microscopeHITACHI LTD·Filed 2001·Granted Apr 1, 2003·11 cites·4 claims
- 0774US6512227B2Method and apparatus for inspecting patterns of a semiconductor device with an electron beamHITACHI LTD·Filed 2001·Granted Jan 28, 2003·10 cites·17 claims
- 0871US6987265B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2002·Granted Jan 17, 2006·9 cites·12 claims
- 0960US8134125B2Method and apparatus of an inspection system using an electron beamIWABUCHI YUKO·Filed 2008·Granted Mar 13, 2012·0 cites·18 claims
- 1059US7232996B2Method and an apparatus of an inspection system using an electron beamHITACHI LTD·Filed 2005·Granted Jun 19, 2007·0 cites·12 claims
- 1158US6580074B1Charged particle beam emitting deviceHITACHI LTD·Filed 1997·Granted Jun 17, 2003·13 cites·20 claims
- 1257US8604430B2Method and an apparatus of an inspection system using an electron beamIWABUCHI YUKO·Filed 2012·Granted Dec 10, 2013·0 cites·6 claims
- 1352US6225628B1Scanning electron microscopeHITACHI LTD·Filed 1997·Granted May 1, 2001·8 cites·7 claims
- 1451US5668372AScanning electron microscope and its analogous deviceHITACHI LTD·Filed 1996·Granted Sep 16, 1997·9 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →