Inventor · disambiguated record
Paul Meneghini
Also filed as: MENEGHINI PAUL · MENEGHINI PAUL MICHAEL
8 granted patents·3 pending applications·113 citations·filing 2004–2025
86Inventor score
Top patents by PatentIndex Score
11 records- 0188US7107834B2Thermal mass flow rate sensor including bypass passageways and a sensor passageway having similar entrance effectsMKS INSTR INC·Filed 2004·Granted Sep 19, 2006·41 cites·23 claims
- 0285US7000463B1Reynolds number correction function for mass flow rate sensorMKS INSTR INC·Filed 2004·Granted Feb 21, 2006·33 cites·15 claims
- 0382US10553403B1Polygonal toroidal plasma sourceMKS INSTR INC·Filed 2019·Granted Feb 4, 2020·3 cites·26 claims
- 0480US7121139B2Thermal mass flow rate sensor having fixed bypass ratioMKS INSTR INC·Filed 2004·Granted Oct 17, 2006·26 cites·27 claims
- 0568US9580318B2Ozone generatorMKS INSTR INC·Filed 2015·Granted Feb 28, 2017·1 cites·10 claims
- 0659US9039985B2Ozone generatorOWENS DAVID KINGSTON·Filed 2011·Granted May 26, 2015·1 cites·25 claims
- 0757US2025385118A1Dual force lift and ground pins for electrostatic chuck and method for use thereofAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 0853US8790464B2Control for and method of pulsed gas deliveryMENEGHINI PAUL·Filed 2010·Granted Jul 29, 2014·2 cites·26 claims
- 0951US6918295B1Thermal mass flow rate sensor providing increased rate of heat transfer to gasMKS INSTR INC·Filed 2004·Granted Jul 19, 2005·6 cites·20 claims
- 1042US2006207503A1Vaporizer and method of vaporizing a liquid for thin film deliveryMENEGHINI PAUL·Filed 2005·Application pending·0 cites
- 1142US2006060139A1Precursor gas delivery with carrier gas mixingMKS INSTR INC·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →