Inventor · disambiguated record
Werner Tabarelli
Also filed as: TABARELLI WERNER
9 granted patents·3,451 citations·filing 1980–1991
91Inventor score
Top patents by PatentIndex Score
9 records- 0197US4509852AApparatus for the photolithographic manufacture of integrated circuit elementsTABARELLI WERNER·Filed 1982·Granted Apr 9, 1985·1.6k cites·4 claims
- 0297US4346164APhotolithographic method for the manufacture of integrated circuitsTABARELLI WERNER·Filed 1980·Granted Aug 24, 1982·1.8k cites·5 claims
- 0385US5146284AInterferometer gas flow systemTABARELLI WERNER·Filed 1989·Granted Sep 8, 1992·43 cites·13 claims
- 0455US4592648ADevice for projection copying of masks onto a workpiecePERKIN ELMER CENSOR·Filed 1985·Granted Jun 3, 1986·12 cites·5 claims
- 0549US5329356AInterferometer head and interferometer arrangement with rigid support structureTABARELLI WERNER·Filed 1990·Granted Jul 12, 1994·15 cites·46 claims
- 0648US5359415AInterferometer for determining the position of displacement travel of a movable measuring mirror or the likeTABARELLI WERNER·Filed 1991·Granted Oct 25, 1994·14 cites·34 claims
- 0740US4621922ADevice for the projection copying of masks onto a workpiecePERKIN ELMER CENSOR·Filed 1984·Granted Nov 11, 1986·6 cites·16 claims
- 0839US4592650AApparatus for projecting a pattern on a semiconductor substratePERKIN ELMER CENSOR·Filed 1985·Granted Jun 3, 1986·5 cites·10 claims
- 0932US4619524ADevice for the projection copying of masksPERKIN ELMER CENSOR·Filed 1984·Granted Oct 28, 1986·3 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →