Inventor · disambiguated record
Sema Ermez
Also filed as: ERMEZ SEMA
6 granted patents·2 pending applications·61 citations·filing 2017–2025
79Inventor score
Files withLAM RES CORP8
Top patents by PatentIndex Score
8 records- 0197US10573522B2Method for preventing line bending during metal fill processLAM RES CORP·Filed 2017·Granted Feb 25, 2020·38 cites·20 claims
- 0296US11355345B2Method for preventing line bending during metal fill processLAM RES CORP·Filed 2019·Granted Jun 7, 2022·21 cites·14 claims
- 0395US12362188B2Method for preventing line bending during metal fill processLAM RES CORP·Filed 2022·Granted Jul 15, 2025·2 cites·14 claims
- 0486US2025323045A1Method for preventing line bending during metal fill processLAM RES CORP·Filed 2025·Application pending·0 cites
- 0574US2025132201A1Nucleation-free depositionLAM RES CORP·Filed 2024·Application pending·0 cites
- 0663US12237221B2Nucleation-free tungsten depositionLAM RES CORP·Filed 2020·Granted Feb 25, 2025·0 cites·20 claims
- 0748US12077858B2Tungsten depositionLAM RES CORP·Filed 2020·Granted Sep 3, 2024·0 cites·21 claims
- 0846US12060639B2Rapid flush purging during atomic layer depositionLAM RES CORP·Filed 2020·Granted Aug 13, 2024·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →